Inventor · disambiguated record
Akinari Hayashi
Also filed as: HAYASHI AKINARI
9 granted patents·4 pending applications·491 citations·filing 2000–2025
87Inventor score
Files withKOKUSAI ELECTRIC CORP5HITACHI INT ELECTRIC INC3HONDA MOTOR CO LTD3HIRANO MAKOTO1KOKUSAI ELECTRIC CO LTD1
Top patents by PatentIndex Score
13 records- 0196US6582174B1Substrate processing apparatus and substrate processing methodKOKUSAI ELECTRIC CO LTD·Filed 2000·Granted Jun 24, 2003·453 cites·20 claims
- 0292US9695509B2Substrate processing apparatus, purging apparatus, method of manufacturing semiconductor device, and recording mediumHITACHI INT ELECTRIC INC·Filed 2013·Granted Jul 4, 2017·17 cites·13 claims
- 0388US8777553B2Semiconductor manufacturing apparatus and semiconductor device manufacturing methodHIRANO MAKOTO·Filed 2012·Granted Jul 15, 2014·10 cites·9 claims
- 0481US10519543B2Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2018·Granted Dec 31, 2019·3 cites·18 claims
- 0580US11203488B2Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2020·Granted Dec 21, 2021·1 cites·18 claims
- 0671US10847397B2Substrate transfer unit, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2019·Granted Nov 24, 2020·1 cites·14 claims
- 0771US10703565B2Substrate processing apparatus, substrate container transport system and operation mechanismHITACHI INT ELECTRIC INC·Filed 2018·Granted Jul 7, 2020·1 cites·14 claims
- 0864US9564706B2Connection unitHONDA MOTOR CO LTD·Filed 2014·Granted Feb 7, 2017·5 cites·7 claims
- 0955US2025006526A1Substrate Cassette Handling Apparatus, Substrate Processing Apparatus, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording MediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 1052US11336156B2Power control unitHONDA MOTOR CO LTD·Filed 2020·Granted May 17, 2022·0 cites·5 claims
- 1147US2025299990A1Substrate processing apparatus, substrate fall preventer, method of processing substrate, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 1246US2008236487A1Semiconductor Manufacturing Apparatus And Semiconductor Device Manufacturing MethodHITACHI INT ELECTRIC INC·Filed 2005·Application pending·0 cites
- 1341US2020274420A1Power feed joint structure of power control unitHONDA MOTOR CO LTD·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →