Inventor · disambiguated record
Akihiro Hisai
Also filed as: HISAI AKIHIRO
13 granted patents·6 pending applications·235 citations·filing 1994–2014
92Inventor score
Top patents by PatentIndex Score
19 records- 0189US8034190B2Substrate processing apparatus and substrate processing methodSOKUDO CO LTD·Filed 2010·Granted Oct 11, 2011·22 cites·17 claims
- 0287US8496761B2Substrate processing apparatus and substrate processing methodKANEYAMA KOJI·Filed 2010·Granted Jul 30, 2013·5 cites·7 claims
- 0383US6080969AApparatus for and method of thermally processing substrateSMC CORP·Filed 1998·Granted Jun 27, 2000·70 cites·6 claims
- 0481US7017658B2Heat processing deviceDAINIPPON SCREEN MFG·Filed 2003·Granted Mar 28, 2006·26 cites·5 claims
- 0579US5927077AProcessing system hot plate construction substrateDAINIPPON SCREEN MFG·Filed 1997·Granted Jul 27, 1999·58 cites·10 claims
- 0673US8956695B2Developing methodHARUMOTO MASAHIKO·Filed 2012·Granted Feb 17, 2015·2 cites·8 claims
- 0773US6736206B2Thermal processorDAINIPPON SCREEN MFG·Filed 2002·Granted May 18, 2004·16 cites·14 claims
- 0868US8137576B2Substrate developing method and developing apparatusHARUMOTO MASAHIKO·Filed 2008·Granted Mar 20, 2012·2 cites·11 claims
- 0968US5514215ATreating liquid supplying apparatus for a substrate spin treating apparatusDAINIPPON SCREEN MFG·Filed 1994·Granted May 7, 1996·24 cites·15 claims
- 1065US7726891B2Substrate processing apparatus and substrate processing methodSOKUDO CO LTD·Filed 2005·Granted Jun 1, 2010·2 cites·10 claims
- 1160US6913781B2Substrate processing apparatus and method including a device for applying a coating and a device for measuring the film quality of the coatingDAINIPPON SCREEN MFG·Filed 2002·Granted Jul 5, 2005·7 cites·16 claims
- 1259US9581907B2Developing apparatusSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2014·Granted Feb 28, 2017·0 cites·10 claims
- 1356US2009103960A1Developing apparatusSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 1453US8580340B2Substrate processing apparatus and substrate processing methodIMAMURA MASANORI·Filed 2010·Granted Nov 12, 2013·1 cites·10 claims
- 1549US2006098979A1Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2005·Application pending·0 cites
- 1648US2006098978A1Substrate processing apparatus and substrate processing methodYASUDA SCHUICHI·Filed 2005·Application pending·0 cites
- 1742US2006292515A1Heat treatment apparatusDAINIPPON SCREEN MFG·Filed 2006·Application pending·0 cites
- 1840US2005220985A1Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2005·Application pending·0 cites
- 1932US2003155077A1Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →