Inventor · disambiguated record
Akira Iwami
Also filed as: IWAMI AKIRA
5 granted patents·24 citations·filing 2001–2010
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0170US7877161B2Method and system for performing a chemical oxide removal processTOKYO ELECTRON LTD·Filed 2003·Granted Jan 25, 2011·13 cites·49 claims
- 0268US8175736B2Method and system for performing a chemical oxide removal processTOMOYASU MASAYUKI·Filed 2010·Granted May 8, 2012·3 cites·52 claims
- 0364US6954716B2Method of automatically resetting processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Oct 11, 2005·8 cites·5 claims
- 0443US7555406B2Method of maintaining and automatically inspecting processing apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Jun 30, 2009·0 cites·5 claims
- 0536US7386423B2Methods of self-diagnosing software for driving processing apparatusTANAKA HISATO·Filed 2004·Granted Jun 10, 2008·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →