Inventor · disambiguated record
Akiko Kiyotomi
Also filed as: KIYOTOMI AKIKO
12 granted patents·9 citations·filing 2012–2023
83Inventor score
Top patents by PatentIndex Score
12 records- 0193US11823922B2Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2023·Granted Nov 21, 2023·2 cites·10 claims
- 0281US11676844B2Coating film forming apparatus and adjustment method thereforTOKYO ELECTRON LTD·Filed 2019·Granted Jun 13, 2023·4 cites·9 claims
- 0379US11609502B2Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2020·Granted Mar 21, 2023·1 cites·19 claims
- 0472US11726438B2Treatment condition setting method, storage medium, and substrate treatment systemTOKYO ELECTRON LTD·Filed 2018·Granted Aug 15, 2023·1 cites·6 claims
- 0571US12314023B2Treatment condition setting method, storage medium, and substrate treatment systemTOKYO ELECTRON LTD·Filed 2023·Granted May 27, 2025·0 cites·7 claims
- 0669US10670966B2Substrate processing apparatus, method of adjusting parameters of coating module, and storage mediumTOKYO ELECTRON LTD·Filed 2018·Granted Jun 2, 2020·1 cites·18 claims
- 0765US11467496B2Substrate processing apparatus, method of adjusting parameters of coating module, and storage mediumTOKYO ELECTRON LTD·Filed 2020·Granted Oct 11, 2022·0 cites·17 claims
- 0863US10901318B2Substrate processing apparatus, method of adjusting parameters of coating module, and storage mediumTOKYO ELECTRON LTD·Filed 2020·Granted Jan 26, 2021·0 cites·16 claims
- 0949US11669955B2Substrate defect inspection method, storage medium, and substrate defect inspection apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jun 6, 2023·0 cites·18 claims
- 1044US11268912B2Substrate inspection method and substrate inspection apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Mar 8, 2022·0 cites·6 claims
- 1142US11378388B2Substrate inspection method, substrate inspection apparatus and recording mediumTOKYO ELECTRON LTD·Filed 2019·Granted Jul 5, 2022·0 cites·8 claims
- 1231US9308542B2Treatment solution supply apparatus, treatment solution supply method, and computer storage mediumKIYOTOMI AKIKO·Filed 2012·Granted Apr 12, 2016·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →