Inventor · disambiguated record
Akira Kodashima
Also filed as: KODASHIMA AKIRA
4 granted patents·1 pending application·12 citations·filing 2001–2022
66Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0175US7883579B2Substrate processing apparatus and lid supporting apparatus for the substrate processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Feb 8, 2011·8 cites·14 claims
- 0261US2023015560A1Substrate processing systemTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0355US11495480B2Substrate processing systemTOKYO ELECTRON LTD·Filed 2020·Granted Nov 8, 2022·0 cites·2 claims
- 0452US7922865B2Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generatorSHINETSU CHEMICAL CO·Filed 2001·Granted Apr 12, 2011·4 cites·11 claims
- 0548US11515183B2Substrate processing systemTOKYO ELECTRON LTD·Filed 2020·Granted Nov 29, 2022·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →