Inventor · disambiguated record
Akhil Mehrotra
Also filed as: MEHROTRA AKHIL
8 granted patents·3 pending applications·11 citations·filing 2016–2024
80Inventor score
Files withAPPLIED MATERIALS INC11
Top patents by PatentIndex Score
11 records- 0193US10957558B2Methods of etching metal-containing layersAPPLIED MATERIALS INC·Filed 2020·Granted Mar 23, 2021·3 cites·20 claims
- 0291US11417537B2Methods of etching metal-containing layersAPPLIED MATERIALS INC·Filed 2021·Granted Aug 16, 2022·2 cites·20 claims
- 0388US10636675B2Methods of etching metal-containing layersAPPLIED MATERIALS INC·Filed 2018·Granted Apr 28, 2020·4 cites·20 claims
- 0478US11942332B2Methods of etching metal-containing layersAPPLIED MATERIALS INC·Filed 2022·Granted Mar 26, 2024·0 cites·20 claims
- 0574US10497578B2Methods for high temperature etching a material layer using protection coatingAPPLIED MATERIALS INC·Filed 2016·Granted Dec 3, 2019·2 cites·16 claims
- 0663US2024047195A1Delayed pulsing for plasma processing of wafersAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0761US2025343030A1Processing chamber and method for integrated etching and depositionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0858US2025069895A1Methods of etching silicon-and-oxygen-containing features at low temperaturesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0950US11127599B2Methods for etching a hardmask layerAPPLIED MATERIALS INC·Filed 2019·Granted Sep 21, 2021·0 cites·20 claims
- 1048US11817312B2Delayed pulsing for plasma processing of wafersAPPLIED MATERIALS INC·Filed 2018·Granted Nov 14, 2023·0 cites·13 claims
- 1145US10867795B2Method of etching hardmasks containing high hardness materialsAPPLIED MATERIALS INC·Filed 2018·Granted Dec 15, 2020·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →