Inventor · disambiguated record
Akihiko Morita
Also filed as: MORITA AKIHIKO
18 granted patents·2 pending applications·2,088 citations·filing 1996–2016
96Inventor score
Top patents by PatentIndex Score
20 records- 0198US8003919B2Substrate heat treatment apparatusDAINIPPON SCREEN MFG·Filed 2006·Granted Aug 23, 2011·481 cites·11 claims
- 0297US7432476B2Substrate heat treatment apparatusDAINIPPON SCREEN MFG·Filed 2006·Granted Oct 7, 2008·502 cites·20 claims
- 0395US8608885B2Substrate heat treatment apparatusGOTO SHIGEHIRO·Filed 2006·Granted Dec 17, 2013·556 cites·26 claims
- 0491US6051101ASubstrate processing apparatus, substrate transport apparatus and substrate transfer apparatusDAINIPPON SCREEN MFG·Filed 1998·Granted Apr 18, 2000·126 cites·24 claims
- 0589US6260562B1Substrate cleaning apparatus and methodDAINIPPON SCREEN MFG·Filed 1998·Granted Jul 17, 2001·98 cites·12 claims
- 0686US9152054B2Exposure device, substrate processing apparatus, method for exposing substrate and substrate processing methodNISHIMURA KAZUHIRO·Filed 2013·Granted Oct 6, 2015·6 cites·14 claims
- 0783US6286525B1Substrate cleaning apparatus and methodDAINIPPON SCREEN MFG·Filed 1998·Granted Sep 11, 2001·67 cites·8 claims
- 0880US7359840B2Remote order acceptance design system and elevator remote order acceptance methodHITACHI LTD·Filed 2007·Granted Apr 15, 2008·8 cites·4 claims
- 0979US6869234B2Developing apparatus and developing methodDAINIPPON SCREEN MFG·Filed 2003·Granted Mar 22, 2005·23 cites·16 claims
- 1079US6062852ASubstrate heat-treating apparatusDAINIPPON SCREEN MFG·Filed 1998·Granted May 16, 2000·57 cites·9 claims
- 1178US6159291ASubstrate treating apparatusDAINIPPON SCREEN MFG·Filed 1998·Granted Dec 12, 2000·47 cites·19 claims
- 1276US6060697ASubstrate processing apparatus having regulated power consumption and method thereforDAINIPPON SCREEN MFG·Filed 1998·Granted May 9, 2000·52 cites·11 claims
- 1372US7249250B1Remote order acceptance design system and elevator remote order acceptance methodHITACHI LTD·Filed 2000·Granted Jul 24, 2007·18 cites·3 claims
- 1470US8383990B2Substrate transport apparatus and heat treatment apparatusSOKUDO CO LTD·Filed 2008·Granted Feb 26, 2013·3 cites·11 claims
- 1565US5853483ASubstrate spin treating method and apparatusDAINIPPON SCREEN MFG·Filed 1996·Granted Dec 29, 1998·32 cites·18 claims
- 1644US10617983B2Filter coupling device and a substrate treating apparatus having sameSCREEN HOLDINGS CO LTD·Filed 2016·Granted Apr 14, 2020·0 cites·5 claims
- 1743US5881876AMethod and vessel for storing a substrate cleaning brushDAINIPPON SCREEN MFG·Filed 1996·Granted Mar 16, 1999·12 cites·30 claims
- 1843US2014261571A1Substrate cleaning and drying method and substrate developing methodSOKUDO CO LTD·Filed 2014·Application pending·0 cites
- 1939US7048801B2Chemical pump and method of discharging chemical solutionDAINIPPON SCREEN MFG·Filed 2003·Granted May 23, 2006·0 cites·8 claims
- 2037US2003111178A1Diaphragm valve, substrate processing unit and substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →