Inventor · disambiguated record
Akira Morohashi
Also filed as: MOROHASHI AKIRA
7 granted patents·3 pending applications·20 citations·filing 2002–2013
77Inventor score
Top patents by PatentIndex Score
10 records- 0183US7891975B2Heat treatment apparatus and method of manufacturing substrateHITACHI INT ELECTRIC INC·Filed 2005·Granted Feb 22, 2011·9 cites·14 claims
- 0270US9373532B2Guide apparatus, exposure apparatus, and method of manufacturing articleCANON KK·Filed 2013·Granted Jun 21, 2016·2 cites·15 claims
- 0358US6905963B2Fabrication of B-doped silicon film by LPCVD method using BCI3 and SiH4 gasesHITACHI INT ELECTRIC INC·Filed 2002·Granted Jun 14, 2005·9 cites·20 claims
- 0449US9280068B2Stage apparatus with flexible utility line, lithography apparatus, and article manufacturing methodCANON KK·Filed 2013·Granted Mar 8, 2016·0 cites·10 claims
- 0547US9124151B2Driving apparatus, exposure apparatus, and method of manufacturing articleCANON KK·Filed 2013·Granted Sep 1, 2015·0 cites·12 claims
- 0643US7901206B2Heat-treating apparatus and method of producing substratesHITACHI INT ELECTRIC INC·Filed 2006·Granted Mar 8, 2011·0 cites·14 claims
- 0739US2007275570A1Heat Treatment ApparatusHITACHI INT ELECTRIC INC·Filed 2005·Application pending·0 cites
- 0837US2003024477A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2002·Application pending·0 cites
- 0936US2014118709A1Holding apparatus, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2013·Application pending·0 cites
- 1034US8963051B2Heat treatment apparatus and method of manufacturing substratesSHIMADA TOMOHARU·Filed 2005·Granted Feb 24, 2015·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →