Inventor · disambiguated record
Akira Obi
Also filed as: OBI AKIRA
9 granted patents·5 pending applications·52 citations·filing 2001–2012
86Inventor score
Technology areasH10P
Top patents by PatentIndex Score
14 records- 0185US7245987B2Cluster tool and transfer control methodTOKYO ELECTRON LTD·Filed 2005·Granted Jul 17, 2007·11 cites·4 claims
- 0282US8821742B2Plasma etching methodYOSHIDA RYOICHI·Filed 2010·Granted Sep 2, 2014·8 cites·11 claims
- 0381US8475623B2Substrate processing method, system and programKAISE SEIICHI·Filed 2012·Granted Jul 2, 2013·5 cites·2 claims
- 0480US7191082B2Method of inspecting substrate processing apparatus, and storage medium storing inspection program for executing the methodTOKYO ELECTRON LTD·Filed 2006·Granted Mar 13, 2007·7 cites·9 claims
- 0568US8257601B2Substrate processing method, system and programKAISE SEIICHI·Filed 2011·Granted Sep 4, 2012·2 cites·1 claims
- 0665US6970770B2Cluster tool and method for controlling transportTOKYO ELECTRON LTD·Filed 2002·Granted Nov 29, 2005·11 cites·10 claims
- 0764US6954716B2Method of automatically resetting processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Oct 11, 2005·8 cites·5 claims
- 0849US2006090703A1Substrate processing method, system and programTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 0944US2006042754A1Plasma etching apparatusTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 1043US7555406B2Method of maintaining and automatically inspecting processing apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Jun 30, 2009·0 cites·5 claims
- 1137US2005064609A1Semiconductor processing systemTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 1236US7386423B2Methods of self-diagnosing software for driving processing apparatusTANAKA HISATO·Filed 2004·Granted Jun 10, 2008·0 cites·18 claims
- 1336US2004071161A1Part maintenance system and part maintenance method of semiconductor processing systemTOKYO ELECTRON LTD·Filed 2003·Application pending·0 cites
- 1434US2002000677A1Part maintenance device of semiconductor processing system and method for operating the sameTOKYO ELECTRON LTD·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →