Inventor · disambiguated record
Akifumi Sano
Also filed as: SANO AKIFUMI
2 granted patents·1 pending application·1 citations·filing 2009–2012
30Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0157US8377269B2Sputtering apparatusULVAC INC·Filed 2009·Granted Feb 19, 2013·1 cites·2 claims
- 0235US9337092B2Method of manufacturing semiconductor deviceULVAC INC·Filed 2012·Granted May 10, 2016·0 cites·3 claims
- 0327US2014332959A1Method of manufacturing semiconductor device and semiconductor deviceHAMAGUCHI JUNICHI·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →