Inventor · disambiguated record
Akira Tanihara
Also filed as: TANIHARA AKIRA
4 granted patents·52 citations·filing 1991–2016
67Inventor score
Top patents by PatentIndex Score
4 records- 0169US5296404AMethod for forming a thin film for a semiconductor deviceSUMITOMO METAL IND·Filed 1991·Granted Mar 22, 1994·51 cites·8 claims
- 0263US9548187B2Microwave radiation antenna, microwave plasma source and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Jan 17, 2017·1 cites·7 claims
- 0341US9640388B2Method for forming insulating film and method for manufacturing semiconductor deviceTOKYO ELECTRON LTD·Filed 2016·Granted May 2, 2017·0 cites·19 claims
- 0435US10319567B2Microwave plasma source and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jun 11, 2019·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →