Inventor · disambiguated record
Akihito Toda
Also filed as: TODA AKIHITO
6 granted patents·4 pending applications·227 citations·filing 1991–2024
85Inventor score
Top patents by PatentIndex Score
10 records- 0191US5147493APlasma generating apparatusTOKYO ELECTRON LTD·Filed 1991·Granted Sep 15, 1992·95 cites·9 claims
- 0276US7297635B2Processing methodTOKYO ELECTRON LTD·Filed 2002·Granted Nov 20, 2007·18 cites·16 claims
- 0372US5385624AApparatus and method for treating substratesTOKYO ELECTRON LTD·Filed 1991·Granted Jan 31, 1995·61 cites·3 claims
- 0471US5858878ASemiconductor wafer etching method and post-etching processTOKYO ELECTRON LTD·Filed 1996·Granted Jan 12, 1999·39 cites·28 claims
- 0554US2025207548A1Intake manifoldMAHLE FILTER SYSTEMS JP CORP·Filed 2024·Application pending·0 cites
- 0652US2009229759A1Annular assembly for plasma processing, plasma processing apparatus, and outer annular memberTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0750US2007298617A1Processing methodTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 0848US6299722B1Etching equipment including a post processing apparatus for removing a resist film, polymer, and impurity layer from an objectTOKYO ELECTRON LTD·Filed 1995·Granted Oct 9, 2001·14 cites·2 claims
- 0943US2008176408A1Method and apparatus for manufacturing semiconductor devices, control program and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1040US8058585B2Plasma processing method, plasma processing apparatus and storage mediumAMEMIYA HIROKI·Filed 2007·Granted Nov 15, 2011·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →