Inventor · disambiguated record
Akihiro Toyozawa
Also filed as: TOYOZAWA AKIHIRO
1 granted patent·3 pending applications·1 citations·filing 2012–2024
14Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0153US2025112066A1Liquid processing apparatus, and monitoring methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0251US2023253219A1Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0339US2015228512A1Substrate treatment method, computer-readable storage medium, and substrate treatment systemTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0437US9463938B2Substrate heat treatment deviceTOYOZAWA AKIHIRO·Filed 2012·Granted Oct 11, 2016·1 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →