Inventor · disambiguated record
Akihiko Tsukada
Also filed as: TSUKADA AKIHIKO
4 granted patents·1 pending application·59 citations·filing 1997–2003
77Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
5 records- 0177US6319327B1MOCVD systemTOKYO ELECTRON LTD·Filed 2000·Granted Nov 20, 2001·22 cites·20 claims
- 0253US7367350B2Processing device and method of maintaining the deviceTOKYO ELECTRON LTD·Filed 2003·Granted May 6, 2008·5 cites·10 claims
- 0348US5951282AVertical heat treatment apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Sep 14, 1999·17 cites·20 claims
- 0447US6042372AHeat treatment apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Mar 28, 2000·15 cites·20 claims
- 0539US2003141016A1Exhaust system for processing apparatusFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →