Inventor · disambiguated record
Akifumi Yao
Also filed as: YAO AKIFUMI
34 granted patents·19 pending applications·364 citations·filing 2007–2025
95Inventor score
Top patents by PatentIndex Score
53 records- 0197US9991138B2Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jun 5, 2018·337 cites·6 claims
- 0292US11618954B2Dry etching method, method for manufacturing semiconductor device, and etching deviceCENTRAL GLASS CO LTD·Filed 2020·Granted Apr 4, 2023·4 cites·12 claims
- 0391US10741406B2Dry etching methodCENTRAL GLASS CO LTD·Filed 2016·Granted Aug 11, 2020·8 cites·19 claims
- 0487US11715641B2Method and device for etching silicon oxideCENTRAL GLASS CO LTD·Filed 2019·Granted Aug 1, 2023·3 cites·10 claims
- 0586US11335573B2Dry etching method and β-diketone-filled containerCENTRAL GLASS CO LTD·Filed 2017·Granted May 17, 2022·4 cites·8 claims
- 0683US2025014906A1Method and device for etching silicon oxideCENTRAL GLASS CO LTD·Filed 2024·Application pending·0 cites
- 0782US12125709B2Method and device for etching silicon oxideCENTRAL GLASS CO LTD·Filed 2023·Granted Oct 22, 2024·0 cites·13 claims
- 0881US11566177B2Dry etching agent, dry etching method and method for producing semiconductor deviceCENTRAL GLASS CO LTD·Filed 2018·Granted Jan 31, 2023·3 cites·12 claims
- 0975US2025174464A1Method and device for etching silicon oxideCENTRAL GLASS CO LTD·Filed 2025·Application pending·0 cites
- 1071US12387940B2Dry etching methodCENTRAL GLASS CO LTD·Filed 2022·Granted Aug 12, 2025·0 cites·10 claims
- 1171US2025326970A1Dry etching method, method for producing semiconductor device, and dry etching gas compositionCENTRAL GLASS COM0PANY LTD·Filed 2025·Application pending·0 cites
- 1270US11049729B2Dry etching method, semiconductor device manufacturing method, and chamber cleaning methodCENTRAL GLASS CO LTD·Filed 2018·Granted Jun 29, 2021·1 cites·18 claims
- 1370US10926211B2Method for purifying fluorine compound gasCENTRAL GLASS CO LTD·Filed 2017·Granted Feb 23, 2021·1 cites·13 claims
- 1470US9238872B2Method for synthesizing fluorine compound by electrolysis and electrode thereforMORI ISAMU·Filed 2012·Granted Jan 19, 2016·1 cites·4 claims
- 1569US9929021B2Dry etching method and dry etching agentCENTRAL GLASS CO LTD·Filed 2016·Granted Mar 27, 2018·1 cites·8 claims
- 1668US10460946B2Naturally oxidized film removing method and naturally oxidized film removing deviceTOKYO ELECTRON LTD·Filed 2016·Granted Oct 29, 2019·1 cites·8 claims
- 1764US2014360884A1Fluorine Gas Generating DeviceCENTRAL GLASS CO LTD·Filed 2014·Application pending·0 cites
- 1861US11658278B2Carbon black for batteries, coating liquid for batteries, positive electrode for nonaqueous batteries and nonaqueous batteryDENKA COMPANY LTD·Filed 2020·Granted May 23, 2023·0 cites·17 claims
- 1958US12460132B2Method for supplying composition, composition and dry etching methodCENTRAL GLASS CO LTD·Filed 2021·Granted Nov 4, 2025·0 cites·10 claims
- 2057US12371618B2Dry etching method, method for producing semiconductor device, and dry etching gas compositionCENTRAL GLASS CO LTD·Filed 2021·Granted Jul 29, 2025·0 cites·12 claims
- 2157US11289340B2Dry etching methodCENTRAL GLASS CO LTD·Filed 2018·Granted Mar 29, 2022·0 cites·7 claims
- 2255US12308244B2Dry etching method, method for producing semiconductor device, and etching deviceCENTRAL GLASS CO LTD·Filed 2020·Granted May 20, 2025·0 cites·23 claims
- 2355US12145857B2Method for producing tungsten hexafluorideCENTRAL GLASS CO LTD·Filed 2019·Granted Nov 19, 2024·0 cites·20 claims
- 2454US2024254074A1Method for purifying trialkylamine, trialkylamine production method and compositionCENTRAL GLASS CO LTD·Filed 2021·Application pending·0 cites
- 2553US11519557B2Method for manufacturing filled container, and filled containerCENTRAL GLASS CO LTD·Filed 2018·Granted Dec 6, 2022·0 cites·15 claims
- 2653US2011124541A1Fluorinated Nano Diamond and Dispersion Thereof, and Process for Production of the SameCENTRAL GLASS CO LTD·Filed 2009·Application pending·0 cites
- 2752US8961631B2Process for production of dispersion of fluorinated nano diamondYAO AKIFUMI·Filed 2008·Granted Feb 24, 2015·0 cites·7 claims
- 2851US11447697B2Substrate processing gas, storage container, and substrate processing methodCENTRAL GLASS CO LTD·Filed 2019·Granted Sep 20, 2022·0 cites·17 claims
- 2951US10872780B2Dry etching agent composition and dry etching methodCENTRAL GLASS CO LTD·Filed 2017·Granted Dec 22, 2020·0 cites·9 claims
- 3048US11282714B2Etching method and etching deviceCENTRAL GLASS CO LTD·Filed 2017·Granted Mar 22, 2022·0 cites·15 claims
- 3148US10457866B2Dry etching gas and dry etching methodCENTRAL GLASS CO LTD·Filed 2016·Granted Oct 29, 2019·0 cites·8 claims
- 3248US2012031752A1Fluorine Gas Generating DeviceMORI ISAMU·Filed 2010·Application pending·0 cites
- 3347US10957554B2Etching method and etching deviceCENTRAL GLASS CO LTD·Filed 2017·Granted Mar 23, 2021·0 cites·7 claims
- 3447US8864960B2Fluorine gas generating apparatusYAO AKIFUMI·Filed 2010·Granted Oct 21, 2014·0 cites·10 claims
- 3547US2008111102A1Chemical Mechanical Polishing SlurryCENTRAL GLASS CO LTD·Filed 2007·Application pending·0 cites
- 3646US11359278B2Treatment method and cleaning method for metal oxyfluoridesCENTRAL GLASS CO LTD·Filed 2018·Granted Jun 14, 2022·0 cites·11 claims
- 3746US9708720B2Gas generation deviceCENTRAL GLASS CO LTD·Filed 2012·Granted Jul 18, 2017·0 cites·2 claims
- 3846US8790541B2Method for preparing fluorinated nanodiamond liquid dispersionYAO AKIFUMI·Filed 2007·Granted Jul 29, 2014·0 cites·5 claims
- 3944US9139918B2Fluorine gas generating apparatusYAO AKIFUMI·Filed 2011·Granted Sep 22, 2015·0 cites·2 claims
- 4044US8951393B2Fluorine gas generating apparatusYAO AKIFUMI·Filed 2011·Granted Feb 10, 2015·0 cites·5 claims
- 4144US2014326596A1Fluorine Gas Generation ApparatusCENTRAL GLASS CO LTD·Filed 2012·Application pending·0 cites
- 4244US2013032600A1Valve For Container Filled With Halogen Gas Or Halogen Compound GasCENTRAL GLASS CO LTD·Filed 2011·Application pending·0 cites
- 4342US2020247685A1Tungsten Hexafluoride Production MethodCENTRAL GLASS CO LTD·Filed 2018·Application pending·0 cites
- 4441US8864961B2Fluorine gas generating apparatusKIKUCHI AKIOU·Filed 2010·Granted Oct 21, 2014·0 cites·4 claims
- 4540US2013221024A1Halogen-containing gas supply apparatus and halogen-containing gas supply methodYAO AKIFUMI·Filed 2011·Application pending·0 cites
- 4638US2018212131A1Thermoelectric conversion material and method for producing sameCENTRAL GLASS CO LTD·Filed 2018·Application pending·0 cites
- 4737US2012318665A1Apparatus for Generating Fluorine GasMIYAZAKI TATSUO·Filed 2011·Application pending·0 cites
- 4837US2018323076A1Substrate Processing Method and Solvent Used for Same MethodCENTRAL GLASS CO LTD·Filed 2016·Application pending·0 cites
- 4936US2012100491A1Semiconductor Production Equipment Including Fluorine Gas GeneratorMORI ISAMU·Filed 2010·Application pending·0 cites
- 5036US2018138053A1Wet Etching Method and Etching SolutionCENTRAL GLASS CO LTD·Filed 2016·Application pending·0 cites
Showing the top 50 of 53 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →