Inventor · disambiguated record
Akihiro Yazawa
Also filed as: YAZAWA AKIHIRO
10 granted patents·4 pending applications·24 citations·filing 2002–2025
82Inventor score
Top patents by PatentIndex Score
14 records- 0186US10525564B2Reversing machine and substrate polishing apparatusEBARA CORP·Filed 2016·Granted Jan 7, 2020·3 cites·15 claims
- 0274US2025367711A1Transfer apparatus, cleaning module, and substrate processing apparatusEBARA CORP·Filed 2025·Application pending·0 cites
- 0372US6824613B2Substrate processing apparatusEBARA CORP·Filed 2002·Granted Nov 30, 2004·16 cites·11 claims
- 0469US8128458B2Polishing apparatus and substrate processing methodSAITO KENICHIRO·Filed 2005·Granted Mar 6, 2012·4 cites·7 claims
- 0567US10593570B2Substrate holding module, substrate processing apparatus, and substrate processing methodEBARA CORP·Filed 2017·Granted Mar 17, 2020·1 cites·14 claims
- 0662US12403507B2Transfer apparatus, cleaning module, and substrate processing apparatusEBARA CORP·Filed 2021·Granted Sep 2, 2025·0 cites·10 claims
- 0759US10071458B2Calibration apparatus and calibration methodEBARA CORP·Filed 2016·Granted Sep 11, 2018·0 cites·19 claims
- 0859US2024017370A1Polishing apparatus and polishing methodEBARA CORP·Filed 2021·Application pending·0 cites
- 0955US2025178149A1Substrate polishing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 1053US2025259867A1Substrate processing apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 1147US11890716B2Polishing unit, substrate processing apparatus, and polishing methodEBARA CORP·Filed 2020·Granted Feb 6, 2024·0 cites·8 claims
- 1247US10508355B2Plating apparatusEBARA CORP·Filed 2017·Granted Dec 17, 2019·0 cites·16 claims
- 1346US12237194B2Substrate transporter and substrate processing apparatus including substrate transporterEBARA CORP·Filed 2019·Granted Feb 25, 2025·0 cites·29 claims
- 1442US10354900B2Substrate transfer apparatus and substrate transfer methodEBARA CORP·Filed 2016·Granted Jul 16, 2019·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →