Inventor · disambiguated record
Akihiro Yokota
Also filed as: YOKOTA AKIHIRO
25 granted patents·7 pending applications·212 citations·filing 1975–2025
95Inventor score
Top patents by PatentIndex Score
32 records- 0184US10651012B2Substrate processing methodTOKYO ELECTRON LTD·Filed 2016·Granted May 12, 2020·3 cites·8 claims
- 0283US8852387B2Plasma processing apparatus and shower headIIZUKA HACHISHIRO·Filed 2011·Granted Oct 7, 2014·6 cites·8 claims
- 0380US4055963AHeating systemDAIKIN IND LTD·Filed 1975·Granted Nov 1, 1977·48 cites·12 claims
- 0479US11145490B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Oct 12, 2021·2 cites·11 claims
- 0578US9390943B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Jul 12, 2016·4 cites·10 claims
- 0678US7472910B1Animation display apparatus, arcade game machine, control method and apparatus thereof, and storage mediumCANON KK·Filed 2000·Granted Jan 6, 2009·66 cites·10 claims
- 0775US9978566B2Plasma etching methodTOKYO ELECTRON LTD·Filed 2016·Granted May 22, 2018·2 cites·6 claims
- 0874US11133157B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Sep 28, 2021·1 cites·14 claims
- 0974US7607023B2Data transfer method, data transfer apparatus, data transmission device, and data reception deviceNTI INC·Filed 2002·Granted Oct 20, 2009·8 cites·3 claims
- 1069US4617578AMulti-beam zoom and focusing lens scan pitch-adjusting recorderDAINIPPON SCREEN MFG·Filed 1985·Granted Oct 14, 1986·25 cites·10 claims
- 1163US2014346040A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 1257US7519722B2Information providing method, information processing device, information collection system, communication method, communication system, relay device, and communication deviceNTI INC·Filed 2003·Granted Apr 14, 2009·2 cites·17 claims
- 1356US6171421B1Prism assembly and method for producing the sameSEKINOS CO LTD·Filed 1997·Granted Jan 9, 2001·19 cites·2 claims
- 1456US2008294717A1Information exchange method, information processor, information gathering system, communication method, communication system, intermediary device, and communication deviceNTI INC·Filed 2008·Application pending·0 cites
- 1554US7126768B2Projection lens unitSEKINOS CO LTD·Filed 2004·Granted Oct 24, 2006·4 cites·4 claims
- 1653US10546723B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Jan 28, 2020·0 cites·7 claims
- 1753US2015072534A1Etching method of multilayer filmTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 1852US12381069B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Aug 5, 2025·0 cites·17 claims
- 1952US8895454B2Etching method of multilayer filmTOKYO ELECTRON LTD·Filed 2014·Granted Nov 25, 2014·0 cites·7 claims
- 2050US10297428B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted May 21, 2019·0 cites·11 claims
- 2149US2025149309A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 2248US12020898B2Plasma processing system and method of processing substrateTOKYO ELECTRON LTD·Filed 2020·Granted Jun 25, 2024·0 cites·5 claims
- 2348US11041241B2Plasma processing apparatus and temperature control methodTOKYO ELECTRON LTD·Filed 2019·Granted Jun 22, 2021·0 cites·5 claims
- 2448US6144499AProjection lensSEKINOS CO LTD·Filed 1999·Granted Nov 7, 2000·13 cites·5 claims
- 2544US2005175173A1Communication deviceFiled 2003·Application pending·0 cites
- 2642US10886135B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jan 5, 2021·0 cites·12 claims
- 2742US7496620B2Calculation apparatusNTI INC·Filed 2002·Granted Feb 24, 2009·0 cites·5 claims
- 2842US4912565AMethod of and apparatus for recording image in the form of pixel arrayDAINIPPON SCREEN MFG·Filed 1988·Granted Mar 27, 1990·7 cites·17 claims
- 2942US2006064449A1Operation apparatus and operation systemNAKAMURA TAKATOSHI·Filed 2002·Application pending·0 cites
- 3041US2019164726A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 3137US10763087B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Sep 1, 2020·0 cites·10 claims
- 3232US4812916AVisual monitoring device which projects an image of a register mark onto a scanning surface for use in setting image processing conditionsDAINIPPON SCREEN MFG·Filed 1987·Granted Mar 14, 1989·2 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →