Inventor · disambiguated record
Alois Aigner
Also filed as: AIGNER ALOIS
3 granted patents·9 citations·filing 2000–2012
62Inventor score
Top patents by PatentIndex Score
3 records- 0173US8283262B2Method for depositing a layer on a semiconductor wafer by means of CVD and chamber for carrying out the methodBRENNINGER GEORG·Filed 2009·Granted Oct 9, 2012·3 cites·4 claims
- 0264US10240235B2Method and apparatus for depositing a material layer originating from process gas on a substrate waferBRENNINGER GEORG·Filed 2012·Granted Mar 26, 2019·2 cites·16 claims
- 0346US6435797B1Method and device for loading a susceptorWACKER SILTRONIC HALBLEITERMAT·Filed 2000·Granted Aug 20, 2002·4 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →