Inventor · disambiguated record
Alejandro Xabier Arrizabalaga Uriarte
Also filed as: ARRIZABALAGA URIARTE ALEJANDRO XABIER
1 granted patent·1 pending application·2 citations·filing 2010–2013
18Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0170US9395633B2Lithographic cluster system, method for calibrating a positioning device of a lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Jul 19, 2016·2 cites·15 claims
- 0221US2011096315A1Calibration method and lithographic apparatus using such a calibration methodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →