Inventor · disambiguated record
Allan Awtrey
Also filed as: AWTREY ALLAN W · AWTREY ALLAN WENDELL
4 granted patents·1 pending application·35 citations·filing 2002–2004
74Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
5 records- 0173US6924086B1Developing photoresist with supercritical fluid and developerTOKYO ELECTRON LTD·Filed 2003·Granted Aug 2, 2005·7 cites·22 claims
- 0271US6928746B2Drying resist with a solvent bath and supercritical CO2TOKYO ELECTRON LTD·Filed 2003·Granted Aug 16, 2005·18 cites·26 claims
- 0359US6953654B2Process and apparatus for removing a contaminant from a substrateTOKYO ELECTRON LTD·Filed 2002·Granted Oct 11, 2005·9 cites·28 claims
- 0458US7044662B2Developing photoresist with supercritical fluid and developerTOKYO ELECTRON LTD·Filed 2004·Granted May 16, 2006·1 cites·22 claims
- 0539US2004072706A1Removal of contaminants using supercritical processingFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →