Inventor · disambiguated record
Alan W. Collins
Also filed as: COLLINS ALAN W
12 granted patents·684 citations·filing 1997–2004
94Inventor score
Files withAPPLIED MATERIALS INC12
Top patents by PatentIndex Score
12 records- 0196US6416823B2Deposition chamber and method for depositing low dielectric constant filmsAPPLIED MATERIALS INC·Filed 2000·Granted Jul 9, 2002·61 cites·24 claims
- 0295US6833052B2Deposition chamber and method for depositing low dielectric constant filmsAPPLIED MATERIALS INC·Filed 2002·Granted Dec 21, 2004·65 cites·38 claims
- 0395US6589610B2Deposition chamber and method for depositing low dielectric constant filmsAPPLIED MATERIALS INC·Filed 2002·Granted Jul 8, 2003·53 cites·46 claims
- 0495US6070551ADeposition chamber and method for depositing low dielectric constant filmsAPPLIED MATERIALS INC·Filed 1997·Granted Jun 6, 2000·135 cites·20 claims
- 0593US6143078AGas distribution system for a CVD processing chamberAPPLIED MATERIALS INC·Filed 1998·Granted Nov 7, 2000·147 cites·29 claims
- 0691US6486081B1Gas distribution system for a CVD processing chamberAPPLIED MATERIALS INC·Filed 1999·Granted Nov 26, 2002·124 cites·51 claims
- 0784US6814814B2Cleaning residues from surfaces in a chamber by sputtering sacrificial substratesAPPLIED MATERIALS INC·Filed 2002·Granted Nov 9, 2004·22 cites·14 claims
- 0880US6633076B2Methods and apparatus for producing stable low k FSG film for HDP-CVDAPPLIED MATERIALS INC·Filed 2002·Granted Oct 14, 2003·24 cites·13 claims
- 0979US6511922B2Methods and apparatus for producing stable low k FSG film for HDP-CVDAPPLIED MATERIALS INC·Filed 2001·Granted Jan 28, 2003·22 cites·16 claims
- 1073US6596123B1Method and apparatus for cleaning a semiconductor wafer processing systemAPPLIED MATERIALS INC·Filed 2000·Granted Jul 22, 2003·15 cites·13 claims
- 1170US7413627B2Deposition chamber and method for depositing low dielectric constant filmsAPPLIED MATERIALS INC·Filed 2004·Granted Aug 19, 2008·6 cites·36 claims
- 1268US6715496B2Method and apparatus for cleaning a semiconductor wafer processing systemAPPLIED MATERIALS INC·Filed 2003·Granted Apr 6, 2004·10 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →