Inventor · disambiguated record
Alex Demos
Also filed as: DEMOS ALEX · DEMOS ALEX T
8 granted patents·1 pending application·519 citations·filing 1996–2010
91Inventor score
Files withLAM RES CORP8
Top patents by PatentIndex Score
9 records- 0196US8025731B2Gas injection system for plasma processingLAM RES CORP·Filed 2010·Granted Sep 27, 2011·24 cites·13 claims
- 0296US6230651B1Gas injection system for plasma processingLAM RES CORP·Filed 1998·Granted May 15, 2001·111 cites·30 claims
- 0394US6184158B1Inductively coupled plasma CVDLAM RES CORP·Filed 1996·Granted Feb 6, 2001·193 cites·60 claims
- 0492US7785417B2Gas injection system for plasma processingLAM RES CORP·Filed 2001·Granted Aug 31, 2010·35 cites·18 claims
- 0584US6028395AVacuum plasma processor having coil with added conducting segments to its peripheral partLAM RES CORP·Filed 1997·Granted Feb 22, 2000·47 cites·76 claims
- 0682US5667631ADry etching of transparent electrodes in a low pressure plasma reactorLAM RES CORP·Filed 1996·Granted Sep 16, 1997·65 cites·48 claims
- 0771US6268700B1Vacuum plasma processor having coil with intermediate portion coupling lower magnetic flux density to plasma than center and peripheral portions of the coilLAM RES CORP·Filed 1997·Granted Jul 31, 2001·23 cites·45 claims
- 0867US6626185B2Method of depositing a silicon containing layer on a semiconductor substrateLAM RES CORP·Filed 1999·Granted Sep 30, 2003·21 cites·17 claims
- 0938US2001019903A1Inductively coupled plasma CVDFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →