Inventor · disambiguated record
Albrecht Ehrmann
Also filed as: EHRMANN ALBRECHT
20 granted patents·6 pending applications·167 citations·filing 2001–2019
94Inventor score
Files withZEISS CARL SMT AG7ZEISS CARL SMT GMBH7INFINEON TECHNOLOGIES AG5EHRMANN ALBRECHT2WEGMANN ULRICH2
Top patents by PatentIndex Score
26 records- 0195US7760366B2System for measuring the image quality of an optical imaging systemZEISS CARL SMT AG·Filed 2008·Granted Jul 20, 2010·34 cites·17 claims
- 0293US7796274B2System for measuring the image quality of an optical imaging systemZEISS CARL SMT AG·Filed 2005·Granted Sep 14, 2010·21 cites·34 claims
- 0390US7408652B2Device and method for the optical measurement of an optical system by using an immersion fluidZEISS CARL SMT AG·Filed 2005·Granted Aug 5, 2008·12 cites·30 claims
- 0488US6835508B2Large-area membrane mask and method for fabricating the maskINFINEON TECHNOLOGIES AG·Filed 2002·Granted Dec 28, 2004·43 cites·6 claims
- 0585US10006807B2Apparatus for determining an optical property of an optical imaging systemZEISS CARL SMT GMBH·Filed 2016·Granted Jun 26, 2018·3 cites·22 claims
- 0685US6696371B2Method for fabricating positionally exact surface-wide membrane masksINFINEON TECHNOLOGIES AG·Filed 2002·Granted Feb 24, 2004·32 cites·11 claims
- 0776US8488127B2System for measuring the image quality of an optical imaging systemMENGEL MARKUS·Filed 2010·Granted Jul 16, 2013·2 cites·38 claims
- 0875US9436095B2Exposure apparatus and measuring device for a projection lensZEISS CARL SMT GMBH·Filed 2012·Granted Sep 6, 2016·1 cites·22 claims
- 0970US8330935B2Exposure apparatus and measuring device for a projection lensEHRMANN ALBRECHT·Filed 2010·Granted Dec 11, 2012·2 cites·24 claims
- 1066US8120763B2Device and method for the optical measurement of an optical system by using an immersion fluidWEGMANN ULRICH·Filed 2009·Granted Feb 21, 2012·1 cites·14 claims
- 1164US8212991B2Optical system of a microlithographic projection exposure apparatusDODOC AURELIAN·Filed 2009·Granted Jul 3, 2012·2 cites·33 claims
- 1261US10345710B2Microlithographic projection exposure apparatus and measuring device for a projection lensZEISS CARL SMT GMBH·Filed 2016·Granted Jul 9, 2019·0 cites·22 claims
- 1361US9429495B2System for measuring the image quality of an optical imaging systemZEISS CARL SMT GMBH·Filed 2014·Granted Aug 30, 2016·0 cites·22 claims
- 1460US8823948B2System for measuring the image quality of an optical imaging systemZEISS CARL SMT GMBH·Filed 2013·Granted Sep 2, 2014·0 cites·20 claims
- 1559US8836929B2Device and method for the optical measurement of an optical system by using an immersion fluidZEISS CARL SMT GMBH·Filed 2012·Granted Sep 16, 2014·0 cites·15 claims
- 1657US2009021726A1Device and method for the optical measurement of an optical system by using an immersion fluidZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 1757US2008309894A1Microlithographic projection exposure apparatus and measuring device for a projection lensZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 1856US2008309904A1Optical system of a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 1955US6773854B2Method of producing a perforated mask for particle radiationINFINEON TECHNOLOGIES AG·Filed 2002·Granted Aug 10, 2004·5 cites·11 claims
- 2055US2012113429A1Device and method for the optical measurement of an optical system by using an immersion fluidWEGMANN ULRICH·Filed 2012·Application pending·0 cites
- 2148US6864182B2Method of producing large-area membrane masks by dry etchingINFINEON TECHNOLOGIES AG·Filed 2002·Granted Mar 8, 2005·3 cites·14 claims
- 2248US2007070316A1Microlithographic projection exposure apparatus and measuring device for a projection lensEHRMANN ALBRECHT·Filed 2006·Application pending·0 cites
- 2347US2008170217A1Optical System of a Microlithographic Projection Exposure ApparatusZEISS CARL SMT AG·Filed 2006·Application pending·0 cites
- 2445US11441970B2Measurement apparatus for measuring a wavefront aberration of an imaging optical systemZEISS CARL SMT GMBH·Filed 2019·Granted Sep 13, 2022·0 cites·21 claims
- 2540US6748879B2Goods transfer station and process for operating such a goods transfer stationDOCK 1 AG·Filed 2002·Granted Jun 15, 2004·6 cites·23 claims
- 2638US6696206B2Lithography mask configurationINFINEON TECHNOLOGIES AG·Filed 2001·Granted Feb 24, 2004·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →