Inventor · disambiguated record
Alexander Epple
Also filed as: EPPLE ALEXANDER
84 granted patents·33 pending applications·821 citations·filing 2001–2025
99Inventor score
Top patents by PatentIndex Score
117 records- 0196US9235136B2Projection exposure apparatus for projection lithographyZEISS CARL SMT GMBH·Filed 2014·Granted Jan 12, 2016·12 cites·20 claims
- 0296US7190530B2Projection objectives including a plurality of mirrors with lenses ahead of mirror M3ZEISS CARL SMT AG·Filed 2006·Granted Mar 13, 2007·56 cites·23 claims
- 0396US7085075B2Projection objectives including a plurality of mirrors with lenses ahead of mirror M3ZEISS CARL SMT AG·Filed 2003·Granted Aug 1, 2006·82 cites·52 claims
- 0495US8107162B2Catadioptric projection objective with intermediate imagesDODOC AURELIAN·Filed 2005·Granted Jan 31, 2012·18 cites·42 claims
- 0595US7426082B2Catadioptric projection objective with geometric beam splittingZEISS CARL SMT AG·Filed 2005·Granted Sep 16, 2008·20 cites·22 claims
- 0695US7203010B2Catadioptric projection objectiveZEISS CARL SMT AG·Filed 2005·Granted Apr 10, 2007·21 cites·24 claims
- 0795US7187503B2Refractive projection objective for immersion lithographyZEISS CARL SMT AG·Filed 2004·Granted Mar 6, 2007·68 cites·48 claims
- 0894US7385756B2Catadioptric projection objectiveZEISS CARL SMT AG·Filed 2005·Granted Jun 10, 2008·42 cites·109 claims
- 0994US7256932B2Optical system for ultraviolet lightZEISS CARL SMT AG·Filed 2005·Granted Aug 14, 2007·38 cites·32 claims
- 1094US7209292B2Projection objective, especially for microlithography, and method for adjusting a projection objectiveZEISS CARL SMT AG·Filed 2003·Granted Apr 24, 2007·56 cites·99 claims
- 1193US7463422B2Projection exposure apparatusZEISS CARL SMT AG·Filed 2007·Granted Dec 9, 2008·19 cites·23 claims
- 1293US6995930B2Catadioptric projection objective with geometric beam splittingZEISS CARL SMT AG·Filed 2003·Granted Feb 7, 2006·39 cites·52 claims
- 1391US8208199B2Catadioptric projection objectiveSHAFER DAVID·Filed 2009·Granted Jun 26, 2012·7 cites·20 claims
- 1490US8390784B2Catadioptric projection objective with pupil mirror, projection exposure apparatus and projection exposure methodEPPLE ALEXANDER·Filed 2009·Granted Mar 5, 2013·14 cites·63 claims
- 1590US8345350B2Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the sameZEISS CARL SMT GMBH·Filed 2009·Granted Jan 1, 2013·20 cites·42 claims
- 1690US8208198B2Catadioptric projection objectiveSHAFER DAVID·Filed 2007·Granted Jun 26, 2012·8 cites·4 claims
- 1790US7712905B2Imaging system with mirror groupZEISS CARL SMT AG·Filed 2005·Granted May 11, 2010·9 cites·31 claims
- 1888US8913316B2Catadioptric projection objective with intermediate imagesZEISS CARL SMT GMBH·Filed 2013·Granted Dec 16, 2014·3 cites·26 claims
- 1988US7782440B2Projection lens system of a microlithographic projection exposure installationZEISS CARL SMT AG·Filed 2005·Granted Aug 24, 2010·8 cites·4 claims
- 2087US7310187B2Projection objective, especially for microlithography, and method for adjusting a projection objectiveZEISS CARL SMT AG·Filed 2007·Granted Dec 18, 2007·8 cites·32 claims
- 2187US6717746B2Catadioptric reduction lensZEISS CARL SEMICONDUCTOR MFG·Filed 2002·Granted Apr 6, 2004·30 cites·24 claims
- 2286US8310752B2Method of manufacturing a projection objective and projection objectiveFELDMANN HEIKO·Filed 2009·Granted Nov 13, 2012·7 cites·5 claims
- 2385US7006304B2Catadioptric reduction lensZEISS CARL SMT AG·Filed 2004·Granted Feb 28, 2006·24 cites·41 claims
- 2485US6806942B2Projection exposure systemZEISS CARL SMT AG·Filed 2003·Granted Oct 19, 2004·32 cites·39 claims
- 2585US6788387B2Lithographic objective having a first lens group including only lenses having a positive refractive powerZEISS CARL SEMICONDUCTOR MFG·Filed 2001·Granted Sep 7, 2004·23 cites·14 claims
- 2684US9772478B2Catadioptric projection objective with parallel, offset optical axesZEISS CARL SMT GMBH·Filed 2015·Granted Sep 26, 2017·2 cites·16 claims
- 2784US7446952B2Catadioptric projection objectiveZEISS CARL SMT AG·Filed 2005·Granted Nov 4, 2008·5 cites·45 claims
- 2883US6765729B2Catadioptric reduction lensZEISS CARL SMT AG·Filed 2002·Granted Jul 20, 2004·28 cites·28 claims
- 2982US7869122B2Catadioptric projection objectiveZEISS CARL SMT AG·Filed 2008·Granted Jan 11, 2011·5 cites·2 claims
- 3082US7760425B2Chromatically corrected catadioptric objective and projection exposure apparatus including the sameZEISS CARL SMT AG·Filed 2007·Granted Jul 20, 2010·9 cites·70 claims
- 3182US7136220B2Catadioptric reduction lensZEISS CARL SMT AG·Filed 2004·Granted Nov 14, 2006·19 cites·54 claims
- 3279US8289619B2Catadioptric projection objectiveSHAFER DAVID·Filed 2011·Granted Oct 16, 2012·2 cites·27 claims
- 3378US7046459B1Catadioptric reductions lensZEISS CARL SMT AG·Filed 2004·Granted May 16, 2006·19 cites·37 claims
- 3475US9097984B2Microlithography projection objectiveZEISS CARL SMT GMBH·Filed 2014·Granted Aug 4, 2015·1 cites·30 claims
- 3575US8446665B2Catadioptric projection objectiveEPPLE ALEXANDER·Filed 2009·Granted May 21, 2013·2 cites·26 claims
- 3674US8804234B2Catadioptric projection objective including an aspherized plateSHAFER DAVID·Filed 2012·Granted Aug 12, 2014·1 cites·24 claims
- 3773US6831794B2Objective with at least one aspheric lensZEISS CARL SMT AG·Filed 2003·Granted Dec 14, 2004·15 cites·12 claims
- 3873US6680803B2Partial objective in an illuminating systemsZEISS CARL SMT AG·Filed 2001·Granted Jan 20, 2004·15 cites·39 claims
- 3971US7697198B2Catadioptric projection objectiveZEISS CARL SMT AG·Filed 2004·Granted Apr 13, 2010·10 cites·14 claims
- 4070US7408716B2Refractive projection objective for immersion lithographyZEISS CARL SMT AG·Filed 2007·Granted Aug 5, 2008·2 cites·17 claims
- 4170US2025341782A1Chromatically corrected imaging illumination optical unit for use in a lithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 4269US2025004382A1Projection lens, projection exposure apparatus and projection exposure methodZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 4369US2018031815A1Catadioptric projection objective with parallel, offset optical axesZEISS CARL SMT GMBH·Filed 2017·Application pending·0 cites
- 4468US7511890B2Refractive optical imaging system, in particular projection objective for microlithographyZEISS CARL SMT AG·Filed 2006·Granted Mar 31, 2009·2 cites·19 claims
- 4568US2014376086A1Catadioptric projection objective with two intermediate images and no more than four lenses between the aperture stop and image planeZEISS CARL SMT GMBH·Filed 2014·Application pending·0 cites
- 4667US8908269B2Immersion catadioptric projection objective having two intermediate imagesZEISS CARL SMT GMBH·Filed 2013·Granted Dec 9, 2014·0 cites·30 claims
- 4766US7719658B2Imaging system for a microlithographical projection light systemZEISS CARL SMT AG·Filed 2005·Granted May 18, 2010·2 cites·27 claims
- 4866US2018373006A1Catadioptric projection objectiveZEISS CARL SMT GMBH·Filed 2018·Application pending·0 cites
- 4965US8319944B2Projection lens system of a microlithographic projection exposure installationBEIERL HELMUT·Filed 2010·Granted Nov 27, 2012·1 cites·20 claims
- 5065US7551361B2Lithography lens system and projection exposure system provided with at least one lithography lens system of this typeZEISS CARL SMT AG·Filed 2004·Granted Jun 23, 2009·7 cites·24 claims
Showing the top 50 of 117 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →