Inventor · disambiguated record
Alexander R. Fox
Also filed as: FOX ALEXANDER R · FOX ALEXANDER RAY
7 granted patents·2 pending applications·35 citations·filing 2015–2023
80Inventor score
Files withLAM RES CORP9
Top patents by PatentIndex Score
9 records- 0193US10763108B2Geometrically selective deposition of a dielectric filmLAM RES CORP·Filed 2017·Granted Sep 1, 2020·9 cites·11 claims
- 0292US10460930B2Selective growth of SiO2 on dielectric surfaces in the presence of copperLAM RES CORP·Filed 2017·Granted Oct 29, 2019·18 cites·20 claims
- 0390US10662526B2Method for selective deposition using a base-catalyzed inhibitorLAM RES CORP·Filed 2018·Granted May 26, 2020·4 cites·19 claims
- 0475US10825679B2Selective growth of SIO2 on dielectric surfaces in the presence of copperLAM RES CORP·Filed 2019·Granted Nov 3, 2020·2 cites·20 claims
- 0574US10643889B2Pre-treatment method to improve selectivity in a selective deposition processLAM RES CORP·Filed 2018·Granted May 5, 2020·2 cites·19 claims
- 0653US12300489B2UV cure for local stress modulationLAM RES CORP·Filed 2021·Granted May 13, 2025·0 cites·20 claims
- 0752US2025382703A1Plasma enhanced low temperature atomic layer deposition of metalsLAM RES CORP·Filed 2023·Application pending·0 cites
- 0849US2020040454A1Method to increase deposition rate of ald processLAM RES CORP·Filed 2018·Application pending·0 cites
- 0936US10240236B2Clean resistant windows for ultraviolet thermal processingLAM RES CORP·Filed 2015·Granted Mar 26, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →