Inventor · disambiguated record
Alexander Kabansky
Also filed as: KABANSKY ALEXANDER
7 granted patents·3 pending applications·135 citations·filing 2013–2020
86Inventor score
Files withLAM RES CORP10
Top patents by PatentIndex Score
10 records- 0198US9805941B2Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)LAM RES CORP·Filed 2017·Granted Oct 31, 2017·44 cites·26 claims
- 0298US9576811B2Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)LAM RES CORP·Filed 2015·Granted Feb 21, 2017·65 cites·26 claims
- 0397US10186426B2Integrating atomic scale processes: ALD (atomic layer deposition) and ale (atomic layer etch)LAM RES CORP·Filed 2017·Granted Jan 22, 2019·16 cites·21 claims
- 0494US10515816B2Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)LAM RES CORP·Filed 2018·Granted Dec 24, 2019·6 cites·18 claims
- 0585US10825680B2Directional deposition on patterned structuresLAM RES CORP·Filed 2018·Granted Nov 3, 2020·3 cites·21 claims
- 0681US2020161139A1Integrating atomic scale processes: ald (atomic layer deposition) and ale (atomic layer etch)LAM RES CORP·Filed 2019·Application pending·0 cites
- 0778US12027375B2Selective etch using a sacrificial maskLAM RES CORP·Filed 2020·Granted Jul 2, 2024·1 cites·21 claims
- 0847US2017178899A1Directional deposition on patterned structuresLAM RES CORP·Filed 2016·Application pending·0 cites
- 0943US11521860B2Selectively etching for nanowiresLAM RES CORP·Filed 2019·Granted Dec 6, 2022·0 cites·18 claims
- 1042US2015079786A1Method and solution for cleaning metal residueLAM RES CORP·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →