Inventor · disambiguated record

Alexandre Kemp

Also filed as: KEMP ALEXANDRE

1 granted patent·1 pending application·0 citations·filing 2019–2022

7Inventor score

Technology areasG03F

Files withZEISS CARL SMT GMBH2

Top patents by PatentIndex Score

2 records

0148US2023082054A1Device and method for controlling the temperature of elements in micro-lithographic projection exposure systemsZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
0238US10466598B2Projection exposure apparatus for semiconductor lithography with increased thermal robustnessZEISS CARL SMT GMBH·Filed 2019·Granted Nov 5, 2019·0 cites·20 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →