Inventor · disambiguated record
Alexey Kovalgin
Also filed as: KOVALGIN ALEXEY · KOVALGIN ALEXEY Y
3 granted patents·2 pending applications·7 citations·filing 2013–2021
58Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0180US10714385B2Selective deposition of tungstenASM IP HOLDING BV·Filed 2017·Granted Jul 14, 2020·6 cites·20 claims
- 0266US11658029B2Method of forming a device structure using selective deposition of gallium nitride and system for sameASM IP HOLDING BV·Filed 2019·Granted May 23, 2023·1 cites·24 claims
- 0348US12209308B2Reactor and related methodsUNIV TWENTE·Filed 2021·Granted Jan 28, 2025·0 cites·16 claims
- 0448US2020343134A1Selective deposition of tungstenASM IP HOLDING BV·Filed 2020·Application pending·0 cites
- 0534US2013337653A1Semiconductor processing apparatus with compact free radical sourceASM IP HOLDING BV·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →