Inventor · disambiguated record
Allen Lau
Also filed as: LAU ALLEN · LAU ALLEN K · LAU ALLEN KA-LING
14 granted patents·8 pending applications·347 citations·filing 2001–2018
93Inventor score
Top patents by PatentIndex Score
22 records- 0197US7480129B2Detachable electrostatic chuck for supporting a substrate in a process chamberAPPLIED MATERIALS INC·Filed 2005·Granted Jan 20, 2009·87 cites·31 claims
- 0293US6726805B2Pedestal with integral shieldAPPLIED MATERIALS INC·Filed 2002·Granted Apr 27, 2004·56 cites·27 claims
- 0392US6652713B2Pedestal with integral shieldAPPLIED MATERIALS INC·Filed 2001·Granted Nov 25, 2003·47 cites·36 claims
- 0491US7907384B2Detachable electrostatic chuck for supporting a substrate in a process chamberAPPLIED MATERIALS INC·Filed 2008·Granted Mar 15, 2011·13 cites·25 claims
- 0591US6837968B2Lower pedestal shieldAPPLIED MATERIALS INC·Filed 2003·Granted Jan 4, 2005·40 cites·17 claims
- 0689US7697260B2Detachable electrostatic chuckAPPLIED MATERIALS INC·Filed 2004·Granted Apr 13, 2010·35 cites·19 claims
- 0784US7252737B2Pedestal with integral shieldAPPLIED MATERIALS INC·Filed 2004·Granted Aug 7, 2007·22 cites·10 claims
- 0884US7148435B2Build-in LOTO device on equipment breaker panelAPPLIED MATERIALS INC·Filed 2005·Granted Dec 12, 2006·16 cites·20 claims
- 0980US6669829B2Shutter disk and blade alignment sensorAPPLIED MATERIALS INC·Filed 2002·Granted Dec 30, 2003·17 cites·16 claims
- 1077US10883174B2Gas diffuser mounting plate for reduced particle generationAPPLIED MATERIALS INC·Filed 2018·Granted Jan 5, 2021·2 cites·20 claims
- 1175US6827825B2Method for detecting the position of a shutter disk in a physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2003·Granted Dec 7, 2004·12 cites·12 claims
- 1269US10927461B2Gas diffuser support structure for reduced particle generationAPPLIED MATERIALS INC·Filed 2018·Granted Feb 23, 2021·0 cites·20 claims
- 1361US2007261951A1Reactive sputtering zinc oxide transparent conductive oxides onto large area substratesYE YAN·Filed 2007·Application pending·0 cites
- 1460US2012000773A1Reactive sputtering zinc oxide transparent conductive oxides onto large area substratesYE YAN·Filed 2011·Application pending·0 cites
- 1557US10923327B2Chamber linerAPPLIED MATERIALS INC·Filed 2018·Granted Feb 16, 2021·0 cites·20 claims
- 1655US9822449B2Showerhead support structuresAPPLIED MATERIALS INC·Filed 2016·Granted Nov 21, 2017·0 cites·18 claims
- 1755US2010065216A1Ring assembly for substrate processing chamberAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 1854US2007062452A1Coil and coil support for generating a plasmaAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 1950US2008011601A1Cooled anodesAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 2048US2007283884A1Ring assembly for substrate processing chamberAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 2143US2004118521A1Coil and coil support for generating a plasmaAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 2237US2017178867A1Gas diffuser having grooved hollow cathodesAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →