Inventor · disambiguated record
Aleksandar Owczarz
Also filed as: OWCZARZ ALEKSANDAR
3 granted patents·25 citations·filing 2001–2004
69Inventor score
Technology areasH10P
Files withLAM RES CORP3
Top patents by PatentIndex Score
3 records- 0168US6676493B1Integrated planarization and clean wafer processing systemLAM RES CORP·Filed 2001·Granted Jan 13, 2004·13 cites·22 claims
- 0263US6767428B1Method and apparatus for chemical mechanical planarizationLAM RES CORP·Filed 2001·Granted Jul 27, 2004·8 cites·13 claims
- 0354US7033250B2Method for chemical mechanical planarizationLAM RES CORP·Filed 2004·Granted Apr 25, 2006·4 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →