Inventor · disambiguated record
Alex Pokrovskiy
Also filed as: POKROVSKIY ALEX
2 granted patents·5 citations·filing 2013–2017
46Inventor score
Files withKLA TENCOR CORP2
Top patents by PatentIndex Score
2 records- 0179US9863761B2Critical dimension uniformity monitoring for extreme ultraviolet reticlesKLA TENCOR CORP·Filed 2013·Granted Jan 9, 2018·5 cites·18 claims
- 0258US10288415B2Critical dimension uniformity monitoring for extreme ultra-violet reticlesKLA TENCOR CORP·Filed 2017·Granted May 14, 2019·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →