Inventor · disambiguated record
Allan M. Radman
Also filed as: RADMAN ALLAN · RADMAN ALLAN M
4 granted patents·1 pending application·149 citations·filing 1999–2001
78Inventor score
Files withLAM RES CORP4
Top patents by PatentIndex Score
5 records- 0187US6550091B1Double-sided wafer edge scrubbing apparatus and method for using the sameLAM RES CORP·Filed 2000·Granted Apr 22, 2003·66 cites·17 claims
- 0283US6187684B1Methods for cleaning substrate surfaces after etch operationsLAM RES CORP·Filed 1999·Granted Feb 13, 2001·71 cites·22 claims
- 0365US6875091B2Method and apparatus for conditioning a polishing pad with sonic energyLAM RES CORP·Filed 2001·Granted Apr 5, 2005·12 cites·31 claims
- 0432US6910949B1Spherical cap-shaped polishing head in a chemical mechanical polishing apparatus for semiconductor wafersLAM RES CORP·Filed 2001·Granted Jun 28, 2005·0 cites·19 claims
- 0527US2001047810A1High rpm megasonic cleaningFiled 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →