Inventor · disambiguated record
Alexander T. Schwarm
Also filed as: SCHWARM ALEXANDER T
33 granted patents·2 pending applications·983 citations·filing 2001–2020
98Inventor score
Files withAPPLIED MATERIALS INC25DUN & BRADSTREET CORP3SHANMUGASUNDRAM ARULKUMAR P2NEHMADI YOUVAL1PARIKH SUKETU ARUN1
Top patents by PatentIndex Score
35 records- 0197US7783375B2Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processingAPPLIED MATERIALS INC·Filed 2007·Granted Aug 24, 2010·42 cites·19 claims
- 0297US7725208B2Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processingAPPLIED MATERIALS INC·Filed 2007·Granted May 25, 2010·40 cites·21 claims
- 0395US7082345B2Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entitiesAPPLIED MATERIALS INC·Filed 2002·Granted Jul 25, 2006·100 cites·43 claims
- 0495US6913938B2Feedback control of plasma-enhanced chemical vapor deposition processesAPPLIED MATERIALS INC·Filed 2002·Granted Jul 5, 2005·115 cites·81 claims
- 0593US7160739B2Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profilesAPPLIED MATERIALS INC·Filed 2001·Granted Jan 9, 2007·58 cites·28 claims
- 0692US7596718B2Ranged fault signatures for fault diagnosisAPPLIED MATERIALS INC·Filed 2007·Granted Sep 29, 2009·30 cites·21 claims
- 0791US7587296B2Adaptive multivariate fault detectionAPPLIED MATERIALS INC·Filed 2007·Granted Sep 8, 2009·28 cites·22 claims
- 0891US7356377B2System, method, and medium for monitoring performance of an advanced process control systemAPPLIED MATERIALS INC·Filed 2004·Granted Apr 8, 2008·63 cites·53 claims
- 0991US7337019B2Integration of fault detection with run-to-run controlAPPLIED MATERIALS INC·Filed 2002·Granted Feb 26, 2008·65 cites·75 claims
- 1091US7333871B2Automated design and execution of experiments with integrated model creation for semiconductor manufacturing toolsAPPLIED MATERIALS INC·Filed 2004·Granted Feb 19, 2008·62 cites·34 claims
- 1190US7201936B2Method of feedback control of sub-atmospheric chemical vapor deposition processesAPPLIED MATERIALS INC·Filed 2002·Granted Apr 10, 2007·59 cites·31 claims
- 1290US6999836B2Method, system, and medium for handling misrepresentative metrology data within an advanced process control systemAPPLIED MATERIALS INC·Filed 2003·Granted Feb 14, 2006·60 cites·68 claims
- 1389US8070909B2Feedback control of chemical mechanical polishing device providing manipulation of removal rate profilesSHANMUGASUNDRAM ARULKUMAR P·Filed 2006·Granted Dec 6, 2011·13 cites·16 claims
- 1489US7047099B2Integrating tool, module, and fab level controlAPPLIED MATERIALS INC·Filed 2002·Granted May 16, 2006·45 cites·46 claims
- 1588US8010321B2Metrics independent and recipe independent fault classesAPPLIED MATERIALS INC·Filed 2007·Granted Aug 30, 2011·24 cites·29 claims
- 1688US7937179B2Dynamic inline yield analysis and prediction of a defect limited yield using inline inspection defectsAPPLIED MATERIALS INC·Filed 2008·Granted May 3, 2011·24 cites·19 claims
- 1788US7831326B2Graphical user interface for presenting multivariate fault contributionsAPPLIED MATERIALS INC·Filed 2007·Granted Nov 9, 2010·19 cites·13 claims
- 1887US7966087B2Method, system and medium for controlling manufacture process having multivariate input parametersAPPLIED MATERIALS INC·Filed 2007·Granted Jun 21, 2011·10 cites·19 claims
- 1986US8694145B2Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profilesSHANMUGASUNDRAM ARULKUMAR P·Filed 2011·Granted Apr 8, 2014·6 cites·20 claims
- 2085US7272459B2Method, system and medium for controlling manufacture process having multivariate input parametersAPPLIED MATERIALS INC·Filed 2003·Granted Sep 18, 2007·42 cites·23 claims
- 2183US7962864B2Stage yield predictionAPPLIED MATERIALS INC·Filed 2008·Granted Jun 14, 2011·15 cites·21 claims
- 2283US7765020B2Graphical user interface for presenting multivariate fault contributionsAPPLIED MATERIALS INC·Filed 2007·Granted Jul 27, 2010·12 cites·26 claims
- 2380US7934125B2Ranged fault signatures for fault diagnosisAPPLIED MATERIALS INC·Filed 2007·Granted Apr 26, 2011·9 cites·22 claims
- 2480US7698012B2Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processingAPPLIED MATERIALS INC·Filed 2002·Granted Apr 13, 2010·19 cites·56 claims
- 2572US8849438B2Factory level process and final product performance control systemPARIKH SUKETU ARUN·Filed 2011·Granted Sep 30, 2014·3 cites·18 claims
- 2668US8799831B2Inline defect analysis for sampling and SPCNEHMADI YOUVAL·Filed 2008·Granted Aug 5, 2014·6 cites·24 claims
- 2765US8483861B2Scheduling modeling system for adaptive, automated data collection and performance analysis of manufacturing system for optimal schedulingSCHWARM ALEXANDER T·Filed 2010·Granted Jul 9, 2013·2 cites·20 claims
- 2861US7970588B2Method, system and medium for controlling manufacturing process using adaptive models based on empirical dataAPPLIED MATERIALS INC·Filed 2007·Granted Jun 28, 2011·2 cites·23 claims
- 2960US7668702B2Method, system and medium for controlling manufacturing process using adaptive models based on empirical dataAPPLIED MATERIALS INC·Filed 2003·Granted Feb 23, 2010·7 cites·31 claims
- 3053US11386336B2Machine learning classifier and prediction engine for artificial intelligence optimized prospect determination on win/loss classificationDUN & BRADSTREET CORP·Filed 2017·Granted Jul 12, 2022·1 cites·32 claims
- 3152US8924904B2Method and apparatus for determining factors for design consideration in yield analysisSVIDENKO VICKY·Filed 2008·Granted Dec 30, 2014·2 cites·18 claims
- 3249US2007169694A1Feedback control of sub-atmospheric chemical vapor deposition processesAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 3339US11238233B2Artificial intelligence engine for generating semantic directions for websites for automated entity targeting to mapped identitiesDUN & BRADSTREET CORP·Filed 2019·Granted Feb 1, 2022·0 cites·25 claims
- 3437US2002192966A1In situ sensor based control of semiconductor processing procedureFiled 2001·Application pending·0 cites
- 3531US11651253B2Machine learning classifier for identifying internet service providers from website trackingDUN & BRADSTREET CORP·Filed 2020·Granted May 16, 2023·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →