Inventor · disambiguated record
Ali Shajii
Also filed as: SHAJII ALI
67 granted patents·17 pending applications·2,014 citations·filing 1999–2024
99Inventor score
Top patents by PatentIndex Score
84 records- 0198US9449793B2Systems, methods and apparatus for choked flow element extractionSHAJII ALI·Filed 2010·Granted Sep 20, 2016·469 cites·16 claims
- 0298US7764140B2Radio frequency power delivery systemMKS INSTR INC·Filed 2006·Granted Jul 27, 2010·139 cites·28 claims
- 0398US6712084B2Apparatus and method for pressure fluctuation insensitive mass flow controlMKS INSTR INC·Filed 2002·Granted Mar 30, 2004·113 cites·25 claims
- 0497US8624501B2Measuring and controlling parameters of a plasma generatorNAGARKATTI SIDDHARTH P·Filed 2010·Granted Jan 7, 2014·50 cites·31 claims
- 0597US7809473B2Apparatus and method for pressure fluctuation insensitive mass flow controlMKS INSTR INC·Filed 2007·Granted Oct 5, 2010·46 cites·21 claims
- 0697US7474968B2Critical flow based mass flow verifierMKS INSTR INC·Filed 2006·Granted Jan 6, 2009·59 cites·14 claims
- 0796US8633782B2Radio frequency power delivery systemNAGARKATTI SIDDHARTH P·Filed 2010·Granted Jan 21, 2014·64 cites·17 claims
- 0895US7615120B2Pulsed mass flow delivery system and methodMKS INSTR INC·Filed 2006·Granted Nov 10, 2009·64 cites·15 claims
- 0995US7424346B2Apparatus and method for pressure fluctuation insensitive mass flow controlMKS INSTR INC·Filed 2005·Granted Sep 9, 2008·35 cites·21 claims
- 1095US7174263B2External volume insensitive flow verificationMKS INSTR INC·Filed 2005·Granted Feb 6, 2007·35 cites·20 claims
- 1194US8003935B2Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometerMKS INSTR INC·Filed 2007·Granted Aug 23, 2011·41 cites·21 claims
- 1294US6810308B2Apparatus and method for mass flow controller with network access to diagnosticsMKS INSTR INC·Filed 2002·Granted Oct 26, 2004·62 cites·22 claims
- 1393US8704171B2Chemical ionization reaction or proton transfer reaction mass spectrometryMKS INSTR INC·Filed 2012·Granted Apr 22, 2014·13 cites·11 claims
- 1493US8334505B2Chemical ionization reaction or proton transfer reaction mass spectrometryROBINSON TIMOTHY ROGER·Filed 2008·Granted Dec 18, 2012·44 cites·6 claims
- 1593US7136767B2Apparatus and method for calibration of mass flow controllerMKS INSTR INC·Filed 2002·Granted Nov 14, 2006·59 cites·47 claims
- 1692US6948508B2Apparatus and method for self-calibration of mass flow controllerMKS INSTR INC·Filed 2002·Granted Sep 27, 2005·56 cites·54 claims
- 1792US6868862B2Apparatus and method for mass flow controller with a plurality of closed loop control code setsMKS INSTR INC·Filed 2002·Granted Mar 22, 2005·56 cites·45 claims
- 1889US7004191B2Apparatus and method for mass flow controller with embedded web serverMKS INSTR INC·Filed 2002·Granted Feb 28, 2006·39 cites·27 claims
- 1989US6932098B2Apparatus and method for pressure fluctuation insensitive mass flow controlMKS INSTR INC·Filed 2004·Granted Aug 23, 2005·33 cites·18 claims
- 2088US7107834B2Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effectsMKS INSTR INC·Filed 2004·Granted Sep 19, 2006·41 cites·23 claims
- 2188US6766260B2Mass flow ratio system and methodMKS INSTR INC·Filed 2002·Granted Jul 20, 2004·36 cites·6 claims
- 2288US6375348B1System and method for the real time determination of the in situ emissivity and temperature of a workpiece during processingEATON CORP·Filed 2000·Granted Apr 23, 2002·40 cites·39 claims
- 2387US8150553B2Apparatus and method for pressure fluctuation insensitive mass flow controlSHAJII ALI·Filed 2010·Granted Apr 3, 2012·8 cites·9 claims
- 2486US10967298B2Driver and control for variable impedence loadFLODESIGN SONICS INC·Filed 2018·Granted Apr 6, 2021·2 cites·10 claims
- 2585US8003936B2Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometerMKS INSTR INC·Filed 2007·Granted Aug 23, 2011·9 cites·26 claims
- 2685US7829353B2Pulsed mass flow delivery system and methodMKS INSTR INC·Filed 2006·Granted Nov 9, 2010·18 cites·6 claims
- 2785US7000463B1Reynolds number correction function for mass flow rate sensorMKS INSTR INC·Filed 2004·Granted Feb 21, 2006·33 cites·15 claims
- 2884US6610968B1System and method for controlling movement of a workpiece in a thermal processing systemAXCELIS TECHNOLOGIES·Filed 2000·Granted Aug 26, 2003·47 cites·44 claims
- 2981US7463991B2Mass flow verifier with flow restrictorMKS INSTR INC·Filed 2006·Granted Dec 9, 2008·11 cites·9 claims
- 3080US7552015B2Apparatus and method for displaying mass flow controller pressureMKS INSTR INC·Filed 2002·Granted Jun 23, 2009·25 cites·26 claims
- 3180US7121139B2Thermal mass flow rate sensor having fixed bypass ratioMKS INSTR INC·Filed 2004·Granted Oct 17, 2006·26 cites·27 claims
- 3280US7007707B2Mass flow ratio system and methodMKS INSTR INC·Filed 2004·Granted Mar 7, 2006·21 cites·39 claims
- 3379US7628860B2Pulsed mass flow delivery system and methodMKS INSTR INC·Filed 2004·Granted Dec 8, 2009·29 cites·19 claims
- 3477US9950282B2Electronic configuration and control for acoustic standing wave generationFLODESIGN SONICS INC·Filed 2017·Granted Apr 24, 2018·1 cites·17 claims
- 3577US9616172B2Fluid flow measurement and controlAMBROSINA JESSE E·Filed 2014·Granted Apr 11, 2017·8 cites·29 claims
- 3677US6783630B2Segmented cold plate for rapid thermal processing (RTP) tool for conduction coolingAXCELIS TECH INC·Filed 2002·Granted Aug 31, 2004·22 cites·62 claims
- 3776US2024423695A1Methods and apparatus for controlled rf treatments and rf generator systemCYNOSURE LLC·Filed 2024·Application pending·0 cites
- 3875US10444770B2Fluid flow measurement and controlIVENIX INC·Filed 2017·Granted Oct 15, 2019·2 cites·28 claims
- 3974US8738187B2Apparatus and method for pressure fluctuation insensitive mass flow controlSHAJII ALI·Filed 2012·Granted May 27, 2014·3 cites·7 claims
- 4074US8037896B2Pressure regulation in remote zonesMKS INSTR INC·Filed 2006·Granted Oct 18, 2011·4 cites·9 claims
- 4173US2023380883A1Methods and apparatus for controlled rf treatments and rf generator systemCYNOSURE INC·Filed 2023·Application pending·0 cites
- 4272US8692466B2Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generatorBENZERROUK SOUHEIL·Filed 2009·Granted Apr 8, 2014·3 cites·44 claims
- 4371US7914603B2Particle trap for a plasma sourceMKS INSTR INC·Filed 2008·Granted Mar 29, 2011·2 cites·56 claims
- 4471US6779394B2Apparatus and method for thermal management of a mass flow controllerMKS INSTR INC·Filed 2001·Granted Aug 24, 2004·16 cites·18 claims
- 4570US2021268406A1Electronic configuration and control for acoustic standing wave generationFLODESIGN SONICS INC·Filed 2021·Application pending·0 cites
- 4669US9433734B2Fluid flow measurement and controlAMBROSINA JESSE E·Filed 2014·Granted Sep 6, 2016·4 cites·27 claims
- 4769US8999104B2Systems, methods and apparatus for separate plasma source controlSHAJII ALI·Filed 2010·Granted Apr 7, 2015·2 cites·16 claims
- 4868US7166187B2Segmented cold plate for rapid thermal processing (RTP) tool for conduction coolingAXCELIS TECH INC·Filed 2004·Granted Jan 23, 2007·12 cites·7 claims
- 4968US6986359B2System and method for controlling pressure in remote zonesMKS INSTR INC·Filed 2004·Granted Jan 17, 2006·18 cites·35 claims
- 5068US6857323B1Two phase flow sensor using tomography techniquesMKS INSTR INC·Filed 2003·Granted Feb 22, 2005·14 cites·26 claims
Showing the top 50 of 84 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →