Inventor · disambiguated record
Alexander R. Shimkunas
Also filed as: SHIMKUNAS ALEXANDER R
6 granted patents·102 citations·filing 1985–1986
85Inventor score
Files withMICRONIX CORP6
Top patents by PatentIndex Score
6 records- 0173US4668336AProcess for making a mask used in x-ray photolithographyMICRONIX CORP·Filed 1986·Granted May 26, 1987·25 cites·7 claims
- 0271US4680243AMethod for producing a mask for use in X-ray photolithography and resulting structureMICRONIX CORP·Filed 1985·Granted Jul 14, 1987·21 cites·61 claims
- 0363US4608268AProcess for making a mask used in x-ray photolithographyMICRONIX CORP·Filed 1985·Granted Aug 26, 1986·17 cites·4 claims
- 0456US4708919AProcess for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structureMICRONIX CORP·Filed 1985·Granted Nov 24, 1987·16 cites·21 claims
- 0552US4671850AMask using polyimide to support a patterned x-ray opaque layerMICRONIX CORP·Filed 1985·Granted Jun 9, 1987·11 cites·10 claims
- 0646US4696878AAdditive process for manufacturing a mask for use in X-ray photolithography and the resulting maskMICRONIX CORP·Filed 1985·Granted Sep 29, 1987·12 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →