Inventor · disambiguated record
Alan Tso
Also filed as: TSO ALAN · TSO ALAN L
8 granted patents·8 pending applications·43 citations·filing 2009–2023
82Inventor score
Top patents by PatentIndex Score
16 records- 0190US9714465B2Gas distribution blocker apparatusTSUEI LUN·Filed 2009·Granted Jul 25, 2017·30 cites·18 claims
- 0289US10903054B2Multi-zone gas distribution systems and methodsAPPLIED MATERIALS INC·Filed 2017·Granted Jan 26, 2021·5 cites·20 claims
- 0384US11581165B2Multi-zone gas distribution systems and methodsAPPLIED MATERIALS INC·Filed 2021·Granted Feb 14, 2023·1 cites·20 claims
- 0482US11637002B2Methods and systems to enhance process uniformityAPPLIED MATERIALS INC·Filed 2014·Granted Apr 25, 2023·4 cites·20 claims
- 0576US12148597B2Multi-zone gas distribution systems and methodsAPPLIED MATERIALS INC·Filed 2023·Granted Nov 19, 2024·0 cites·19 claims
- 0674US8728918B2Method and apparatus for fabricating silicon heterojunction solar cellsAPPLIED MATERIALS INC·Filed 2012·Granted May 20, 2014·3 cites·17 claims
- 0760US2010136261A1Modulation of rf returning straps for uniformity controlAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 0859US2010104754A1Multiple gas feed apparatus and methodAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 0959US2010112212A1Adjustable gas distribution apparatusAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 1057US2013012030A1Method and apparatus for remote plasma source assisted silicon-containing film depositionAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 1155US11609505B2Apparatus and methods for verification and re-use of process fluidsAPPLIED MATERIALS INC·Filed 2021·Granted Mar 21, 2023·0 cites·21 claims
- 1254US11239061B2Methods and systems to enhance process uniformityAPPLIED MATERIALS INC·Filed 2017·Granted Feb 1, 2022·0 cites·20 claims
- 1349US2013004681A1Mini blocker plate with standoff spacersAPPLIED MATERIALS INC·Filed 2011·Application pending·0 cites
- 1444US2024160117A1Process cell for filed guided post exposure bake processAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1537US2018254203A1Apparatus and method to reduce particle formation on substrates in post selective etch processAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 1635US2012171852A1Remote hydrogen plasma source of silicon containing film depositionYUAN ZHENG·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →