Inventor · disambiguated record
Alexander Vogler
Also filed as: VOGLER ALEXANDER
6 granted patents·3 pending applications·13 citations·filing 2011–2023
75Inventor score
Top patents by PatentIndex Score
9 records- 0186US11274914B2Measuring assembly for the frequency-based determination of the position of a componentZEISS CARL SMT GMBH·Filed 2020·Granted Mar 15, 2022·3 cites·22 claims
- 0280US9513452B2Damping deviceVOGLER ALEXANDER·Filed 2011·Granted Dec 6, 2016·7 cites·34 claims
- 0370US9665011B2Arrangement for actuating at least one optical element in an optical systemZEISS CARL SMT GMBH·Filed 2015·Granted May 30, 2017·1 cites·29 claims
- 0469US10303065B2Arrangement for actuating at least one optical element in an optical systemZEISS CARL SMT GMBH·Filed 2017·Granted May 28, 2019·1 cites·19 claims
- 0564US9887613B2Lithography device with eddy-current brakeZEISS CARL SMT GMBH·Filed 2014·Granted Feb 6, 2018·1 cites·27 claims
- 0660US2023229092A1Adaptive optical element for microlithographyZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0759US2024085783A1Optical device, method for adjusting a setpoint deformation and lithography systemZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0852US2023228798A1Method and device for measuring actuators in a projection exposure apparatus for semiconductor lithographyZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0947US10571816B2Assembly in a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2019·Granted Feb 25, 2020·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →