Inventor · disambiguated record
Alon Yagil
Also filed as: YAGIL ALON
1 granted patent·1 pending application·0 citations·filing 2021–2023
8Inventor score
Files withKLA CORP2
Top patents by PatentIndex Score
2 records- 0157US2024167813A1System and method for suppression of tool induced shift in scanning overlay metrologyKLA CORP·Filed 2023·Application pending·0 cites
- 0247US11454894B2Systems and methods for scatterometric single-wavelength measurement of misregistration and amelioration thereofKLA CORP·Filed 2021·Granted Sep 27, 2022·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →