Inventor · disambiguated record
Amit Pharkya
Also filed as: PHARKYA AMIT
2 granted patents·493 citations·filing 2016–2016
73Inventor score
Technology areasH10P
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0196US9847221B1Low temperature formation of high quality silicon oxide films in semiconductor device manufacturingLAM RES CORP·Filed 2016·Granted Dec 19, 2017·389 cites·20 claims
- 0295US9601319B1Systems and methods for eliminating flourine residue in a substrate processing chamber using a plasma-based processLAM RES CORP·Filed 2016·Granted Mar 21, 2017·104 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →