Inventor · disambiguated record
Anatoly Aadamov
Also filed as: AADAMOV ANATOLY
5 granted patents·37 citations·filing 2013–2016
78Inventor score
Files withD2S INC5
Top patents by PatentIndex Score
5 records- 0195US8719739B2Method and system for forming patterns using charged particle beam lithographyD2S INC·Filed 2013·Granted May 6, 2014·22 cites·33 claims
- 0282US10031413B2Method and system for forming patterns using charged particle beam lithographyD2S INC·Filed 2016·Granted Jul 24, 2018·3 cites·20 claims
- 0382US8959463B2Method and system for dimensional uniformity using charged particle beam lithographyD2S INC·Filed 2013·Granted Feb 17, 2015·5 cites·26 claims
- 0480US9400857B2Method and system for forming patterns using charged particle beam lithographyD2S INC·Filed 2013·Granted Jul 26, 2016·5 cites·12 claims
- 0571US9104109B2Method and system for improving critical dimension uniformity using shaped beam lithographyD2S INC·Filed 2013·Granted Aug 11, 2015·2 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →