Inventor · disambiguated record
Andrew H. Breninger
Also filed as: BRENINGER ANDREW H
9 granted patents·3 pending applications·40 citations·filing 2003–2025
85Inventor score
Top patents by PatentIndex Score
12 records- 0196US11365479B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2020·Granted Jun 21, 2022·8 cites·16 claims
- 0294US12227837B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2022·Granted Feb 18, 2025·2 cites·19 claims
- 0394US10760158B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2018·Granted Sep 1, 2020·14 cites·23 claims
- 0492US10460977B2Lift pin holder with spring retention for substrate processing systemsLAM RES CORP·Filed 2016·Granted Oct 29, 2019·10 cites·19 claims
- 0579US12163219B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2022·Granted Dec 10, 2024·0 cites·19 claims
- 0670US2025226191A1Plasma viewportLAM RES CORP·Filed 2025·Application pending·0 cites
- 0760US12272534B2Plasma viewportLAM RES CORP·Filed 2020·Granted Apr 8, 2025·0 cites·19 claims
- 0853US12266509B2Multilayer coatings of component parts for a work piece processing chamberLAM RES CORP·Filed 2019·Granted Apr 1, 2025·0 cites·20 claims
- 0952US2025372357A1Parasitic plasma suppressorLAM RES CORP·Filed 2023·Application pending·0 cites
- 1050US12500114B2Wafer lift pin mechanism for preventing local backside depositionLAM RES CORP·Filed 2021·Granted Dec 16, 2025·0 cites·18 claims
- 1147US6765734B1Adjustable sample holder for optical equipmentHINDS INSTRUMENTS INC·Filed 2003·Granted Jul 20, 2004·6 cites·19 claims
- 1238US2022406645A1Coin-slot and ball-lock ceramic lift pin holdersLAM RES CORP·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →