Inventor · disambiguated record
Anshuman Cherala
Also filed as: CHERALA ANSHUMAN
42 granted patents·9 pending applications·540 citations·filing 2003–2025
97Inventor score
Top patents by PatentIndex Score
51 records- 0198US7462028B2Partial vacuum environment imprintingMOLECULAR IMPRINTS INC·Filed 2007·Granted Dec 9, 2008·108 cites·5 claims
- 0298US7170589B2Apparatus to vary dimensions of a substrate during nano-scale manufacturingMOLECULAR IMPRINTS INC·Filed 2005·Granted Jan 30, 2007·45 cites·27 claims
- 0397US7636999B2Method of retaining a substrate to a wafer chuckMOLECULAR IMPRINTS INC·Filed 2005·Granted Dec 29, 2009·49 cites·18 claims
- 0496US7635263B2Chucking system comprising an array of fluid chambersMOLECULAR IMPRINTS INC·Filed 2007·Granted Dec 22, 2009·44 cites·20 claims
- 0596US7635445B2Method of separating a mold from a solidified layer disposed on a substrateMOLECULAR IMPRINTS INC·Filed 2005·Granted Dec 22, 2009·33 cites·15 claims
- 0696US7298456B2System for varying dimensions of a substrate during nanoscale manufacturingMOLECULAR IMPRINTS INC·Filed 2005·Granted Nov 20, 2007·45 cites·18 claims
- 0795US7798801B2Chucking system for nano-manufacturingMOLECULAR IMPRINTS INC·Filed 2005·Granted Sep 21, 2010·25 cites·18 claims
- 0895US7420654B2Method of varying dimensions of a substrate during nano-scale manufacturingMOLECULAR IMPRINTS INC·Filed 2005·Granted Sep 2, 2008·34 cites·17 claims
- 0993US10026609B2Nanoshape patterning techniques that allow high-speed and low-cost fabrication of nanoshape structuresUNIV TEXAS·Filed 2015·Granted Jul 17, 2018·46 cites·30 claims
- 1092US9993962B2Method of imprinting to correct for a distortion within an imprint systemCANON KK·Filed 2016·Granted Jun 12, 2018·8 cites·18 claims
- 1192US7323130B2Magnification correction employing out-of-plane distortion of a substrateMOLECULAR IMPRINTS INC·Filed 2003·Granted Jan 29, 2008·45 cites·16 claims
- 1291US10578984B2Adaptive chucking systemCANON KK·Filed 2016·Granted Mar 3, 2020·4 cites·11 claims
- 1391US7768624B2Method for obtaining force combinations for template deformation using nullspace and methods optimization techniquesUNIV TEXAS·Filed 2007·Granted Aug 3, 2010·13 cites·5 claims
- 1489US8033815B2Chucking system for nano-manufacturingMOLECULAR IMPRINTS INC·Filed 2010·Granted Oct 11, 2011·7 cites·7 claims
- 1584US7535549B2System and method for improvement of alignment and overlay for microlithographyUNIV TEXAS·Filed 2005·Granted May 19, 2009·11 cites·27 claims
- 1683US10553501B2Apparatus for use in forming an adaptive layer and a method of using the sameCANON KK·Filed 2018·Granted Feb 4, 2020·3 cites·14 claims
- 1781US10191368B2Multi-field overlay control in jet and flash imprint lithographyUNIV TEXAS·Filed 2016·Granted Jan 29, 2019·2 cites·15 claims
- 1880US11347144B2Overlay improvement in nanoimprint lithographyCANON KK·Filed 2020·Granted May 31, 2022·1 cites·2 claims
- 1980US10335984B2Imprint apparatus and article manufacturing methodCANON KK·Filed 2015·Granted Jul 2, 2019·3 cites·15 claims
- 2079US2025349592A1Apparatus including a bonding head and a method of using the sameCANON KK·Filed 2025·Application pending·0 cites
- 2176US11604409B2Template replicationCANON KK·Filed 2022·Granted Mar 14, 2023·0 cites·8 claims
- 2275US9778578B2Low contact imprint lithography template chuck system for improved overlay correctionCANON NANOTECHNOLOGIES INC·Filed 2014·Granted Oct 3, 2017·2 cites·16 claims
- 2374US12463081B2Apparatus including a bonding head and a method of using the sameCANON KK·Filed 2023·Granted Nov 4, 2025·0 cites·14 claims
- 2473US8033813B2Chucking system comprising an array of fluid chambersMOLECULAR IMPRINTS INC·Filed 2009·Granted Oct 11, 2011·3 cites·14 claims
- 2571US8968620B2Safe separation for nano imprintingIM SE-HYUK·Filed 2011·Granted Mar 3, 2015·6 cites·27 claims
- 2670US12269282B2Nanoimprint lithography template with peripheral pockets, system of using the template, and method of using the templateCANON KK·Filed 2021·Granted Apr 8, 2025·0 cites·20 claims
- 2765US12498634B2System and method for generating control values for overlay control of an imprint toolCANON KK·Filed 2022·Granted Dec 16, 2025·0 cites·17 claims
- 2865US12317421B2Apparatus including a plurality of heads and a method of using the sameCANON KK·Filed 2022·Granted May 27, 2025·0 cites·19 claims
- 2965US11020894B2Safe separation for nano imprintingMOLECULAR IMPRINTS INC·Filed 2018·Granted Jun 1, 2021·0 cites·10 claims
- 3060US12153342B2Nanofabrication method with correction of distortion within an imprint systemCANON KK·Filed 2022·Granted Nov 26, 2024·0 cites·19 claims
- 3160US2025167165A1System including a plurality of die heads with releasably coupled die chucks and a method of using the sameCANON KK·Filed 2023·Application pending·0 cites
- 3259US12124165B2Apparatus and method for optimizing actuator forcesCANON KK·Filed 2021·Granted Oct 22, 2024·0 cites·13 claims
- 3358US2015165671A1Safe separation for nano imprintingCANON NANOTECHNOLOGIES INC·Filed 2015·Application pending·0 cites
- 3456US11550216B2Systems and methods for curing a shaped filmCANON KK·Filed 2019·Granted Jan 10, 2023·0 cites·17 claims
- 3556US11454883B2Template replicationCANON KK·Filed 2016·Granted Sep 27, 2022·0 cites·13 claims
- 3656US2024222351A1Method of forming a die structure including a controlled thickness layer and an apparatus for performing the methodCANON KK·Filed 2022·Application pending·0 cites
- 3755US11366384B2Nanoimprint lithography system and method for adjusting a radiation pattern that compensates for slippage of a templateCANON KK·Filed 2019·Granted Jun 21, 2022·0 cites·19 claims
- 3855US11199774B2Method and apparatus to improve frame cure imaging resolution for extrusion controlCANON KK·Filed 2020·Granted Dec 14, 2021·0 cites·27 claims
- 3954US11327409B2Systems and methods for curing an imprinted fieldCANON KK·Filed 2019·Granted May 10, 2022·0 cites·18 claims
- 4054US7261830B2Applying imprinting material to substrates employing electromagnetic fieldsUNIV TEXAS·Filed 2003·Granted Aug 28, 2007·3 cites·13 claims
- 4153US10866510B2Overlay improvement in nanoimprint lithographyCANON KK·Filed 2018·Granted Dec 15, 2020·0 cites·9 claims
- 4251US11262652B2Nanofabrication method with correction of distortion within an imprint systemCANON KK·Filed 2020·Granted Mar 1, 2022·0 cites·20 claims
- 4351US2010314803A1Chucking System for Nano-ManufacturingMOLECULAR IMPRINTS INC·Filed 2010·Application pending·0 cites
- 4450US9778562B2Porous template and imprinting stack for nano-imprint lithographyXU FRANK Y·Filed 2008·Granted Oct 3, 2017·0 cites·20 claims
- 4549US11567401B2Nanofabrication method with correction of distortion within an imprint systemCANON KK·Filed 2019·Granted Jan 31, 2023·0 cites·19 claims
- 4648US2010259745A1Method for obtaining force combinations for template deformation using nullspace and methods optimization techniquesMOLECULAR IMPRINTS INC·Filed 2010·Application pending·0 cites
- 4746US2007231422A1System to vary dimensions of a thin templateMOLECULAR IMPRINTS INC·Filed 2007·Application pending·0 cites
- 4845US2005270516A1System for magnification and distortion correction during nano-scale manufacturingMOLECULAR IMPRINTS INC·Filed 2004·Application pending·0 cites
- 4942US10996560B2Real-time correction of template deformation in nanoimprint lithographyCANON KK·Filed 2017·Granted May 4, 2021·0 cites·11 claims
- 5041US2011084417A1Large area linear array nanoimprintingMOLECULAR IMPRINTS INC·Filed 2010·Application pending·0 cites
Showing the top 50 of 51 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →