Inventor · disambiguated record
Anthony De La Llera
Also filed as: DE LA LLERA ANTHONY
29 granted patents·6 pending applications·2,144 citations·filing 2001–2024
97Inventor score
Files withLAM RES CORP19DE LA LLERA ANTHONY7KADKHODAYAN BABAK4AUGUSTINO JASON1BETTENCOURT GREGORY R1
Top patents by PatentIndex Score
35 records- 0198US8573152B2Showerhead electrodeDE LA LLERA ANTHONY·Filed 2010·Granted Nov 5, 2013·595 cites·17 claims
- 0298US8402918B2Showerhead electrode with centering featureKADKHODAYAN BABAK·Filed 2009·Granted Mar 26, 2013·435 cites·14 claims
- 0398US8206506B2Showerhead electrodeKADKHODAYAN BABAK·Filed 2008·Granted Jun 26, 2012·434 cites·13 claims
- 0497US11594400B2Multi zone gas injection upper electrode systemLAM RES CORP·Filed 2020·Granted Feb 28, 2023·6 cites·11 claims
- 0597US8161906B2Clamped showerhead electrode assemblyKADKHODAYAN BABAK·Filed 2008·Granted Apr 24, 2012·49 cites·17 claims
- 0696US7854820B2Upper electrode backing member with particle reducing featuresLAM RES CORP·Filed 2006·Granted Dec 21, 2010·38 cites·7 claims
- 0795US8419959B2Clamped monolithic showerhead electrodeBETTENCOURT GREGORY R·Filed 2010·Granted Apr 16, 2013·482 cites·20 claims
- 0893US8313805B2Clamped showerhead electrode assemblyKADKHODAYAN BABAK·Filed 2012·Granted Nov 20, 2012·16 cites·10 claims
- 0987US9245716B2Edge-clamped and mechanically fastened inner electrode of showerhead electrode assemblyDE LA LLERA ANTHONY·Filed 2010·Granted Jan 26, 2016·11 cites·12 claims
- 1087US8470127B2Cam-locked showerhead electrode and assemblyDE LA LLERA ANTHONY·Filed 2011·Granted Jun 25, 2013·11 cites·9 claims
- 1186US8702866B2Showerhead electrode assembly with gas flow modification for extended electrode lifeAUGUSTINO JASON·Filed 2006·Granted Apr 22, 2014·10 cites·19 claims
- 1277US7226055B1Substrate holding and spinning assembly and methods for making the sameLAM RES CORP·Filed 2003·Granted Jun 5, 2007·20 cites·12 claims
- 1375US2025043425A1Showerhead faceplates with angled gas distribution passages for semiconductor processing toolsLAM RES CORP·Filed 2024·Application pending·0 cites
- 1471US8847495B2Movable grounding arrangements in a plasma processing chamber and methods thereforDE LA LLERA ANTHONY·Filed 2012·Granted Sep 30, 2014·2 cites·15 claims
- 1571US8709202B2Upper electrode backing member with particle reducing featuresDE LA LLERA ANTHONY·Filed 2010·Granted Apr 29, 2014·2 cites·11 claims
- 1668US10262834B2Edge-clamped and mechanically fastened inner electrode of showerhead electrode assemblyLAM RES CORP·Filed 2015·Granted Apr 16, 2019·1 cites·15 claims
- 1767US9076826B2Plasma confinement ring assembly for plasma processing chambersDE LA LLERA ANTHONY·Filed 2011·Granted Jul 7, 2015·2 cites·23 claims
- 1867US6949016B1Gimballed conditioning apparatusLAM RES CORP·Filed 2002·Granted Sep 27, 2005·11 cites·20 claims
- 1964US8628268B2Cam lock electrode clampKELLOGG MICHAEL C·Filed 2009·Granted Jan 14, 2014·2 cites·20 claims
- 2063US12139791B2Showerhead faceplates with angled gas distribution passages for semiconductor processing toolsLAM RES CORP·Filed 2021·Granted Nov 12, 2024·0 cites·19 claims
- 2162US6712670B2Method and apparatus for applying downward force on wafer during CMPLAM RES CORP·Filed 2001·Granted Mar 30, 2004·7 cites·10 claims
- 2259US6746313B1Polishing head assembly in an apparatus for chemical mechanical planarizationLAM RES CORP·Filed 2001·Granted Jun 8, 2004·7 cites·19 claims
- 2355US12505991B2Tunability of edge plasma density for tilt controlLAM RES CORP·Filed 2021·Granted Dec 23, 2025·0 cites·17 claims
- 2455US2025054778A1Improved thermal and electrical interface between parts in an etch chamberLAM RES CORP·Filed 2022·Application pending·0 cites
- 2553US9093483B2Showerhead electrode assembly with gas flow modification for extended electrode lifeLAM RES CORP·Filed 2014·Granted Jul 28, 2015·0 cites·17 claims
- 2651US12387916B2Magnetic field control systemLAM RES CORP·Filed 2022·Granted Aug 12, 2025·0 cites·24 claims
- 2750US9263240B2Dual zone temperature control of upper electrodesMARAKHTANOV ALEXEI·Filed 2012·Granted Feb 16, 2016·0 cites·10 claims
- 2850US2023260768A1Plasma discharge uniformity control using magnetic fieldsLAM RES CORP·Filed 2021·Application pending·0 cites
- 2949US6761626B2Air platen for leading edge and trailing edge controlLAM RES CORP·Filed 2001·Granted Jul 13, 2004·3 cites·11 claims
- 3049US2008087641A1Components for a plasma processing apparatusLAM RES CORP·Filed 2006·Application pending·0 cites
- 3146US2023057217A1Gas distribution faceplate with oblique flow pathsLAM RES CORP·Filed 2021·Application pending·0 cites
- 3245US9111731B2Gas feed insert in a plasma processing chamber and methods thereforDE LA LLERA ANTHONY·Filed 2012·Granted Aug 18, 2015·0 cites·21 claims
- 3343US8313665B2Showerhead electrode assemblies for plasma processing apparatusesSTEVENSON THOMAS R·Filed 2010·Granted Nov 20, 2012·0 cites·11 claims
- 3442US2022005675A1Dual-phase cooling in semiconductor manufacturingLAM RES CORP·Filed 2019·Application pending·0 cites
- 3541US7018276B2Air platen for leading edge and trailing edge controlLAM RES CORP·Filed 2004·Granted Mar 28, 2006·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →