Inventor · disambiguated record
Andreas Hauke
Also filed as: HAUKE ANDREAS
2 granted patents·159 citations·filing 1997–1998
69Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0186US6005226ARapid thermal processing (RTP) system with gas driven rotating substrateSTEAG RTP SYSTEMS·Filed 1997·Granted Dec 21, 1999·121 cites·26 claims
- 0264US6449428B2Gas driven rotating susceptor for rapid thermal processing (RTP) systemMATTSON TECHNOLOGY CORP·Filed 1998·Granted Sep 10, 2002·38 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →