Inventor · disambiguated record
Andreas Hegedus
Also filed as: HEGEDUS ANDREAS · HEGEDUS ANDREAS G
59 granted patents·14 pending applications·1,707 citations·filing 1985–2023
98Inventor score
Top patents by PatentIndex Score
73 records- 0198US7955646B2Elimination of flow and pressure gradients in low utilization processesAPPLIED MATERIALS INC·Filed 2004·Granted Jun 7, 2011·381 cites·17 claims
- 0296US6264467B1Micro grooved support surface for reducing substrate wear and slip formationAPPLIED MATERIALS INC·Filed 1999·Granted Jul 24, 2001·547 cites·38 claims
- 0394US4585516AVariable duty cycle, multiple frequency, plasma reactorTEGAL CORP·Filed 1985·Granted Apr 29, 1986·212 cites·7 claims
- 0493US8003492B2Epitaxial lift off stack having a unidirectionally shrunk handle and methods thereofALTA DEVICES INC·Filed 2009·Granted Aug 23, 2011·13 cites·20 claims
- 0593US5147721ACeramic reinforced glass matrixHEXCEL CORP·Filed 1989·Granted Sep 15, 1992·46 cites·13 claims
- 0692US9175393B1Tiled showerhead for a semiconductor chemical vapor deposition reactorHIGASHI GREGG·Filed 2011·Granted Nov 3, 2015·16 cites·21 claims
- 0792US8895845B2Photovoltaic deviceKIZILYALLI ISIK C·Filed 2010·Granted Nov 25, 2014·8 cites·7 claims
- 0892US6376804B1Semiconductor processing system with lamp coolingAPPLIED MATERIALS INC·Filed 2000·Granted Apr 23, 2002·60 cites·19 claims
- 0990US8895846B2Photovoltaic deviceKIZILYALLI ISIK C·Filed 2010·Granted Nov 25, 2014·6 cites·3 claims
- 1089US8104951B2Temperature uniformity measurements during rapid thermal processingADERHOLD WOLFGANG·Filed 2007·Granted Jan 31, 2012·18 cites·19 claims
- 1188US10066297B2Tiled showerhead for a semiconductor chemical vapor deposition reactorALTA DEVICES INC·Filed 2015·Granted Sep 4, 2018·5 cites·20 claims
- 1288US8536492B2Processing multilayer semiconductors with multiple heat sourcesRAMAMURTHY SUNDAR·Filed 2005·Granted Sep 17, 2013·17 cites·3 claims
- 1388US7279657B2Scanned rapid thermal processing with feed forward controlAPPLIED MATERIALS INC·Filed 2005·Granted Oct 9, 2007·11 cites·18 claims
- 1486US8937244B2Photovoltaic deviceKIZILYALLI ISIK C·Filed 2009·Granted Jan 20, 2015·6 cites·7 claims
- 1586US5078818AMethod for producing a fiber-reinforced ceramic honeycomb panelHEXCEL CORP·Filed 1990·Granted Jan 7, 1992·50 cites·13 claims
- 1684US4614639ACompound flow plasma reactorTEGAL CORP·Filed 1985·Granted Sep 30, 1986·29 cites·9 claims
- 1782US8895847B2Photovoltaic device with increased light trappingKIZILYALLI ISIK C·Filed 2010·Granted Nov 25, 2014·2 cites·11 claims
- 1882US7727828B2Method for fabricating a gate dielectric of a field effect transistorAPPLIED MATERIALS INC·Filed 2006·Granted Jun 1, 2010·8 cites·22 claims
- 1982US5729423APuncture resistant electrostatic chuckAPPLIED MATERIALS INC·Filed 1996·Granted Mar 17, 1998·57 cites·45 claims
- 2080US8985911B2Wafer carrier trackHE GANG·Filed 2010·Granted Mar 24, 2015·2 cites·13 claims
- 2179US12356848B2Solar antenna array fabricationNOVASOLIX INC·Filed 2023·Granted Jul 8, 2025·0 cites·5 claims
- 2279US8602707B2Methods and apparatus for a chemical vapor deposition reactorHE GANG·Filed 2009·Granted Dec 10, 2013·5 cites·1 claims
- 2378US7279689B2Contact opening metrologyAPPLIED MATERIALS ISRAEL LTD·Filed 2005·Granted Oct 9, 2007·4 cites·19 claims
- 2477US5986875APuncture resistant electrostatic chuckAPPLIED MATERIALS INC·Filed 1998·Granted Nov 16, 1999·42 cites·32 claims
- 2576US9029687B2Photovoltaic device with back side contactsKIZILYALLI ISIK C·Filed 2009·Granted May 12, 2015·3 cites·14 claims
- 2676US6079874ATemperature probes for measuring substrate temperatureAPPLIED MATERIALS INC·Filed 1998·Granted Jun 27, 2000·49 cites·19 claims
- 2775US7038224B2Contact opening metrologyAPPLIED MATERIALS ISRAEL LTD·Filed 2003·Granted May 2, 2006·13 cites·71 claims
- 2873US8314011B2Epitaxial lift off stack having a non-uniform handle and methods thereofGMITTER THOMAS·Filed 2009·Granted Nov 20, 2012·2 cites·11 claims
- 2973US5128195AWoven core structureHEXCEL CORP·Filed 1990·Granted Jul 7, 1992·42 cites·8 claims
- 3071US9029680B2Integration of a photovoltaic deviceKIZILYALLI ISIK C·Filed 2009·Granted May 12, 2015·2 cites·20 claims
- 3170US11824264B2Solar antenna array fabricationNOVASOLIX INC·Filed 2022·Granted Nov 21, 2023·0 cites·34 claims
- 3270US8362592B2Tiled substrates for deposition and epitaxial lift off processesALTA DEVICES INC·Filed 2010·Granted Jan 29, 2013·2 cites·24 claims
- 3369US8686284B2Photovoltaic device with increased light trappingKIZILYALLI ISIK C·Filed 2009·Granted Apr 1, 2014·1 cites·4 claims
- 3469US7986871B2Processing multilayer semiconductors with multiple heat sourcesAPPLIED MATERIALS INC·Filed 2008·Granted Jul 26, 2011·2 cites·18 claims
- 3568US9165805B2Tape-based epitaxial lift off apparatuses and methodsGMITTER THOMAS·Filed 2009·Granted Oct 20, 2015·2 cites·12 claims
- 3667US9068278B2Multiple stack deposition for epitaxial lift offHE GANG·Filed 2009·Granted Jun 30, 2015·2 cites·47 claims
- 3767US9070764B2Epitaxial lift off stack having a pre-curved handle and methods thereofARCHER MELISSA·Filed 2009·Granted Jun 30, 2015·1 cites·8 claims
- 3866US7476875B2Contact opening metrologyAPPLIED MATERIALS ISRAEL LTD·Filed 2007·Granted Jan 13, 2009·1 cites·15 claims
- 3965US8674214B2Thin absorber layer of a photovoltaic deviceKIZILYALLI ISIK C·Filed 2009·Granted Mar 18, 2014·0 cites·11 claims
- 4064US7906348B2Method of feed forward control of scanned rapid thermal processingAPPLIED MATERIALS INC·Filed 2006·Granted Mar 15, 2011·1 cites·22 claims
- 4163US8912432B2Photovoltaic device including an intermediate layerKIZILYALLI ISIK C·Filed 2010·Granted Dec 16, 2014·0 cites·6 claims
- 4263US8669467B2Thin absorber layer of a photovoltaic deviceKIZILYALLI ISIK C·Filed 2010·Granted Mar 11, 2014·0 cites·7 claims
- 4363US5017522ACeramic bodies of controlled porosity and process for making sameHEXCEL CORP·Filed 1989·Granted May 21, 1991·16 cites·12 claims
- 4461US8859042B2Methods for heating with lampsHE GANG·Filed 2010·Granted Oct 14, 2014·1 cites·19 claims
- 4559US9679814B2Epitaxial lift off stack having a pre-curved handle and methods thereofALTA DEVICES INC·Filed 2015·Granted Jun 13, 2017·0 cites·18 claims
- 4659US8309432B2Epitaxial lift off stack having a universally shrunk handle and methods thereofARCHER MELISSA·Filed 2009·Granted Nov 13, 2012·0 cites·8 claims
- 4759US6121581ASemiconductor processing systemAPPLIED MATERIALS INC·Filed 1999·Granted Sep 19, 2000·22 cites·10 claims
- 4857US10797187B2Photovoltaic device with back side contactsALTA DEVICES INC·Filed 2015·Granted Oct 6, 2020·0 cites·20 claims
- 4957US8716107B2Epitaxial lift off stack having a non-uniform handle and methods thereofGMITTER THOMAS·Filed 2012·Granted May 6, 2014·0 cites·13 claims
- 5056US9647148B2Device for individual finger isolation in an optoelectronic deviceALTA DEVICES INC·Filed 2014·Granted May 9, 2017·0 cites·14 claims
Showing the top 50 of 73 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →