Inventor · disambiguated record
Andreas Kadavanich
Also filed as: KADAVANICH ANDREAS
4 granted patents·3 pending applications·52 citations·filing 2003–2017
77Inventor score
Top patents by PatentIndex Score
7 records- 0186US9653264B2Inductively coupled plasma source for plasma processingNAGORNY VLADIMIR·Filed 2011·Granted May 16, 2017·9 cites·5 claims
- 0284US7232767B2Slotted electrostatic shield modification for improved etch and CVD process uniformityMATTSON TECH INC·Filed 2004·Granted Jun 19, 2007·25 cites·20 claims
- 0372US7799685B2System and method for removal of photoresist in transistor fabrication for integrated circuit manufacturingMATTSON TECH INC·Filed 2004·Granted Sep 21, 2010·16 cites·23 claims
- 0463US8413604B2Slotted electrostatic shield modification for improved etch and CVD process uniformityGEORGE RENE·Filed 2006·Granted Apr 9, 2013·2 cites·11 claims
- 0552US2017243721A1Inductively Coupled Plasma Source for Plasma ProcessingMATTSON TECH INC·Filed 2017·Application pending·0 cites
- 0652US2013196510A1Slotted electrostatic shield modification for improved etch and cvd process uniformityMATTSON TECH INC·Filed 2013·Application pending·0 cites
- 0737US2004084150A1Photoresist implant crust removalFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →