Inventor · disambiguated record
Anton Koriakin
Also filed as: KORIAKIN ANTON
12 granted patents·5 pending applications·12 citations·filing 2017–2024
83Inventor score
Files withSEMES CO LTD17
Top patents by PatentIndex Score
17 records- 0189US10908503B2Apparatus for treating substrateSEMES CO LTD·Filed 2019·Granted Feb 2, 2021·7 cites·11 claims
- 0278US11004675B2Substrate cleaning composition, substrate treating method, and substrate treating apparatusSEMES CO LTD·Filed 2018·Granted May 11, 2021·2 cites·17 claims
- 0378US10915026B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2018·Granted Feb 9, 2021·2 cites·10 claims
- 0470US11410862B2Apparatus for processing substrate including cooling member closer to central axis than heating memberSEMES CO LTD·Filed 2019·Granted Aug 9, 2022·1 cites·8 claims
- 0560US12198923B2Substrate processing method and substrate processing systemSEMES CO LTD·Filed 2022·Granted Jan 14, 2025·0 cites·19 claims
- 0660US11940734B2Apparatus and method for treating substrateSEMES CO LTD·Filed 2022·Granted Mar 26, 2024·0 cites·19 claims
- 0760US2025079197A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0859US2025214120A1Substrate treatment apparatus and substrate treatment methodSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0951US11530375B2Substrate cleaning compositions, substrate cleaning method and substrate treating apparatusSEMES CO LTD·Filed 2019·Granted Dec 20, 2022·0 cites·8 claims
- 1050US11977332B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2020·Granted May 7, 2024·0 cites·14 claims
- 1149US12429283B2Method and apparatus for treating a substrateSEMES CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·10 claims
- 1249US2023369081A1Apparatus for processing substrate and semiconductor manufacturing apparatus including the sameSEMES CO LTD·Filed 2023·Application pending·0 cites
- 1348US10773281B2Anhydrous substrate cleaning composition, substrate treating method, and substrate treating apparatusSEMES CO LTD·Filed 2017·Granted Sep 15, 2020·0 cites·15 claims
- 1446US2021166939A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2020·Application pending·0 cites
- 1543US2020026194A1Method for treating substrateSEMES CO LTD·Filed 2019·Application pending·0 cites
- 1641US11887866B2Supercritical processing apparatusSEMES CO LTD·Filed 2019·Granted Jan 30, 2024·0 cites·13 claims
- 1739US10711228B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2018·Granted Jul 14, 2020·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →