Inventor · disambiguated record
Anthony M. Ledger
Also filed as: LEDGER ANTHONY · LEDGER ANTHONY M
11 granted patents·806 citations·filing 1991–1999
94Inventor score
Top patents by PatentIndex Score
11 records- 0194US5515167ATransparent optical chuck incorporating optical monitoringHUGHES AIRCRAFT CO·Filed 1994·Granted May 7, 1996·226 cites·25 claims
- 0293US5386119AApparatus and method for thick wafer measurementHUGHES AIRCRAFT CO·Filed 1993·Granted Jan 31, 1995·95 cites·14 claims
- 0392US5365340AApparatus and method for measuring the thickness of thin filmsHUGHES AIRCRAFT CO·Filed 1992·Granted Nov 15, 1994·87 cites·26 claims
- 0490US5555474AAutomatic rejection of diffraction effects in thin film metrologyINTEGRATED PROCESS EQUIPMENT C·Filed 1994·Granted Sep 10, 1996·68 cites·21 claims
- 0590US5333049AApparatus and method for interferometrically measuring the thickness of thin films using full aperture irradiationHUGHES AIRCRAFT CO·Filed 1991·Granted Jul 26, 1994·73 cites·42 claims
- 0688US5502564ASubstrate thickness measurement using oblique incidence multispectral interferometryHUGHES AIRCRAFT CO·Filed 1994·Granted Mar 26, 1996·64 cites·22 claims
- 0785US5436725ACofocal optical system for thickness measurements of patterned wafersHUGHES AIRCRAFT CO·Filed 1993·Granted Jul 25, 1995·47 cites·13 claims
- 0883US5452953AFilm thickness measurement of structures containing a scattering surfaceHUGHES AIRCRAFT CO·Filed 1993·Granted Sep 26, 1995·49 cites·21 claims
- 0982US5291269AApparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variationsHUGHES AIRCRAFT CO·Filed 1992·Granted Mar 1, 1994·47 cites·48 claims
- 1078US5293214AApparatus and method for performing thin film layer thickness metrology by deforming a thin film layer into a reflective condenserHUGHES AIRCRAFT CO·Filed 1992·Granted Mar 8, 1994·39 cites·52 claims
- 1136US6242926B1Method and apparatus for moving an article relative to and between a pair of thickness measuring probes to develop a thickness map for the articleIPEC PREC INC·Filed 1999·Granted Jun 5, 2001·11 cites·8 claims
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