Inventor · disambiguated record
Andrej Mitrovic
Also filed as: MITROVIC ANDREJ · MITROVIC ANDREJ J
3 granted patents·1 pending application·67 citations·filing 2003–2024
71Inventor score
Top patents by PatentIndex Score
4 records- 0190US7230204B2Method and system for temperature control of a substrateTOKYO ELECTRON LTD·Filed 2004·Granted Jun 12, 2007·54 cites·40 claims
- 0275US8173980B2Gas cluster ion beam system with cleaning apparatusGRAF MICHAEL·Filed 2010·Granted May 8, 2012·4 cites·17 claims
- 0366US2025060324A1Hybrid x-ray and optical metrology and navigationTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0462US7017652B2Method and apparatus for transferring heat from a substrate to a chuckTOKYO ELECTRON LTD·Filed 2003·Granted Mar 28, 2006·9 cites·54 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →