Inventor · disambiguated record
Andrew James Pfau
Also filed as: PFAU ANDREW JAMES
2 granted patents·3 pending applications·0 citations·filing 2020–2024
27Inventor score
Files withLAM RES CORP5
Top patents by PatentIndex Score
5 records- 0178US2025122639A1Electrochemical deposition system including optical probesLAM RES CORP·Filed 2024·Application pending·0 cites
- 0272US2025003908A1Systems and methods for in-situ measurement of sheet resistance on substratesLAM RES CORP·Filed 2024·Application pending·0 cites
- 0361US12180607B2Electrochemical deposition system including optical probesLAM RES CORP·Filed 2020·Granted Dec 31, 2024·0 cites·19 claims
- 0461US12105039B2Systems and methods for in-situ measurement of sheet resistance on substratesLAM RES CORP·Filed 2020·Granted Oct 1, 2024·0 cites·19 claims
- 0546US2024055282A1Systems and techniques for optical measurement of thin filmsLAM RES CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →